A long-wave infrared broadband achromatic metasurface lens
A long-wave infrared and metasurface technology, applied in the field of infrared imaging and micro-nano photonics, can solve the problem of inability to eliminate broadband light chromatic aberration, achieve smooth structural changes, suppress scattering effects, and ensure achromatic effects
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Embodiment 1
[0078] A long-wave infrared broadband achromatic metasurface lens with a diameter of 240 μm and a numerical aperture of 0.5 can achieve high-efficiency achromatic near-diffraction-limited focusing at any wavelength within the working wavelength range of 8-12 μm. In this embodiment, the average back focal length of the lens is 208 μm, and the maximum axial focal length drift is less than 4%. The three-dimensional schematic diagram of the metalens is as follows figure 1 As shown, the schematic diagram of the two-dimensional structure on the vertical section of the metalens is as follows figure 2 shown.
[0079] In this embodiment, in this embodiment, the structure of one of the metasurface lens units is as follows image 3 As shown, the microstructure is a silicon column made of silicon material, and the projection pattern of the microstructure on the dielectric substrate is as follows Figure 4 Among the concentric circular rings shown in (c) are nested circular patterns; in...
Embodiment 2
[0086] A long-wave infrared broadband achromatic metasurface lens with a diameter of 1 mm and a numerical aperture of 0.15. In this embodiment, both the substrate and the microstructure array of the superlens are made of silicon, and the manufacturing process of the superlens is simplified through the all-silicon design, and the manufacturing cycle and cost of the superlens are shortened. In terms of design, the high transmittance window of the metalens unit under the all-silicon material is obtained by scanning the units with different unit period and silicon column height parameter combinations, and the unit period is 3.5 μm, and the height is 8 μm. The high transmittance size combination is selected. According to the phase and dispersion formula under the parameters of diameter 1mm and numerical aperture 0.15, the theoretical distribution of phase-dispersion on the surface of the metalens is obtained.
[0087] For the simulation and optimization methods of the phase-dispers...
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