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Ignition chamber of a quartz diffusion furnace

A technology of ignition chamber and diffusion furnace, applied in the field of diffusion furnace, can solve the problem of low safety of thermocouple

Active Publication Date: 2021-04-13
北京凯德石英股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] In order to improve the common problem that the temperature measuring couple on the ignition chamber of the diffusion furnace is exposed and the safety is low, the application provides an ignition chamber of a quartz diffusion furnace

Method used

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  • Ignition chamber of a quartz diffusion furnace
  • Ignition chamber of a quartz diffusion furnace
  • Ignition chamber of a quartz diffusion furnace

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Embodiment Construction

[0081] The following is attached Figure 1-6 The application is described in further detail.

[0082] The embodiment of the present application discloses an ignition chamber of a quartz diffusion furnace.

[0083] refer to figure 1 , an ignition chamber of a quartz diffusion furnace includes an ignition chamber body 1, a temperature measuring couple 11 is pierced on the ignition chamber body 1, and one end of the temperature measuring couple 11 extends into the ignition chamber body 1 for temperature measurement, and the temperature measuring couple 11 The other end is located outside the ignition chamber body 1, and the ignition chamber body 1 is provided with a protective device 2 for shielding the temperature measuring couple 11 outside the ignition chamber body 1.

[0084] refer to figure 1 with figure 2 The protective device 2 includes a protective cover 21 and a protective blade 22. The protective cover 21 is a hollow cylinder and is fixedly connected to the outer w...

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Abstract

This application relates to an ignition chamber of a quartz diffusion furnace, which belongs to the technical field of diffusion furnaces, and includes an ignition chamber body, which is provided with a temperature measuring couple on the ignition chamber body, and is also provided with a A protective device for shielding by a thermocouple, the protective device includes a protective cover, the protective cover is fixedly connected to the ignition chamber body and the thermocouple is located in the protective cover; protective blades, the protective blades There are a plurality of blades which are all rotatably connected to the protective cover, and the plurality of protective blades are circumferentially arranged and form a shield for the protective cover. This application has the effect of shielding the protruding part of the thermocouple to improve safety.

Description

technical field [0001] The present application relates to the field of diffusion furnaces, in particular to an ignition chamber of a quartz diffusion furnace. Background technique [0002] Diffusion refers to the phenomenon that substance molecules transfer from high-concentration areas to low-concentration areas until they are uniformly distributed, and the rate is proportional to the concentration gradient of the substance. Diffusion is a phenomenon of mass transfer due to the thermal motion of molecules, mainly due to density differences. Diffusion technology is a basic and important semiconductor technology. [0003] Diffusion technology is mainly used to form base emitter and collector regions in bipolar devices, source and drain regions in MOS devices, polysilicon doping, etc. Diffusion technology is also called doping, which means doping one substance into another to form a p-n junction. [0004] For example, in the mass-produced crystalline silicon solar cell manu...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F27D21/00F27D1/18
CPCF27D1/1808F27D21/0014
Inventor 张忠恕陈强王连连张娟冯继瑶于洋边占宁张连兴李宝军赵晓亮李翔星卢亮周洁王笑波
Owner 北京凯德石英股份有限公司
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