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A sample transfer device and transfer method

A technology of sample transfer and sample stage, which is applied in the direction of measuring devices, instruments, scientific instruments, etc., can solve the problems of complex transfer devices and processes, difficulty in popularization and application, and high price, so as to reduce the probability of transfer failure and facilitate popularization and application. Good atmospheric environment isolation effect

Active Publication Date: 2022-03-01
INST OF CHEM CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

There are also commercialized vacuum transfer cabins (negative pressure transfer) for electron spectrometers, but they are expensive, bulky (cannot be placed in a glove box), and the transfer device and process are complicated, so it is difficult to popularize application

Method used

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  • A sample transfer device and transfer method
  • A sample transfer device and transfer method
  • A sample transfer device and transfer method

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Experimental program
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Embodiment approach

[0079] According to an embodiment of the present invention, the elastic sealing suction assembly 300 may further include:

[0080] Sealing head 301, when the sealing head 301 is pressed down, the bottom seals the vent hole 2011 of the sealing cover 200;

[0081] an elastic element 302, the elastic element 302 is arranged between the sealing pressure head 301 and the suction element 303;

[0082] A suction element 303, the suction element 303 is provided with a suction channel 3031;

[0083] an outer sealing portion 304, the outer sealing portion 304 is arranged along the circumferential direction of the sealing head 301, so that a sealing space 305 is formed in the circumferential direction of the sealing head 301;

[0084] Sealing space 305, the sealing space 305 extends upwards from the bottom of the sealing head 301, when there is a space between the suction element 303 and the sealing head 301, the sealing space 305 and the sealing head 301 The suction channel 3031 of th...

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Abstract

The present invention relates to a sample transfer device and a transfer method. The device includes: a sample stage, the sample stage is used for placing samples; a sealing cover, the sealing cover includes a cover body, the cover body is covered on the sample stage, and the cover body is provided with a ventilation hole; elastic A sealing suction assembly, the elastic sealing suction assembly elastically presses the ventilation hole of the sealing cover, and enables the ventilation hole to communicate with the suction channel when the elastic sealing suction assembly is moved away from the ventilation hole . The invention has both positive and negative pressure transfer modes, is suitable for different sample transfer requirements, and the cost can be reduced by an order of magnitude, which is more conducive to popularization and application; for general air-sensitive samples, it saves the trouble of separately configuring vacuuming and other equipment, and can directly Air-sensitive samples are kept in a vacuum, and the new device enables better isolation of the atmospheric environment during transfer.

Description

technical field [0001] The invention relates to the technical field of photoelectron energy spectrum analysis, in particular to an air-sensitive sample transfer device and a transfer method of a photoelectron energy spectrum analyzer. Background technique [0002] X-ray Photoelectron Spectroscopy (XPS) is an energy spectrum technology based on the photoelectric effect. It uses soft X-rays of a certain energy to excite the inner electrons of the surface atoms of the material, and detects the kinetic energy and number of photoelectrons. In this way, the chemical state information and relative content of each element on the sample surface can be obtained. The conventional sampling method of the XPS instrument is to prepare the sample on the standard sample holder, and then transfer it to the sampling chamber of the instrument for pre-evacuation. During this process, the samples are exposed to the atmosphere and are sensitive to some air ( Such as easy to oxidize, easy to deliq...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N23/2273G01N23/2202G01N23/2204
CPCG01N23/2273G01N23/2202G01N23/2204
Inventor 袁震章小余赵志娟
Owner INST OF CHEM CHINESE ACAD OF SCI
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