Trapezoidal comb tooth, electrostatic comb tooth driver and MEMS scanning mirror

Abstract

The invention discloses a trapezoidal comb tooth; the width of the root of the trapezoidal comb tooth is larger than that of the head of the trapezoidal comb tooth, and the width of the trapezoidal comb tooth is monotonously reduced from the root of the trapezoidal comb tooth to the head of the trapezoidal comb tooth. Due to the trapezoidal comb tooth design, the width of the comb tooth root is larger than that of the comb tooth head, and the rigidity of the comb tooth root can be greatly improved under the condition that the average width of the comb teeth is kept unchanged; under the condition of a fixed chip size, compared with a rectangular comb tooth structure in the prior art, the trapezoidal comb tooth structure has the advantages that the driving torque of a comb tooth driver can be greatly improved, the driving angle is increased, or the size of the chip is reduced, the driving voltage is reduced, the technical performance of the chip is greatly improved, and the cost of the chip is reduced.

Description

technical field [0001] The invention relates to the technical field of micro-opto-electromechanical systems, in particular to a trapezoidal comb, a MEMS scanning mirror and a preparation method. Background technique [0002] Optical scanning technology is an electric drive to drive optical components such as optical mirrors and optical lenses to achieve regular operation and scanning of light beams or imaging points. It has a wide range of applications in modern optical technology and has become a key technology in optical technology. Especially for laser technology, the laser is generally a collimated beam, which needs to be scanned or pointed by a laser scanning mirror, so as to realize laser scanning of a specific pattern and laser pointing in a specific direction, and complete laser scanning, laser pointing, laser tracking, and laser scanning. Projection imaging, dynamic structured light generation, laser three-dimensional measurement, laser 3D printing, laser processing...

AI Technical Summary

Problems solved by technology

However, when the length of the comb teeth is long, such as the length L of the comb teeth reaches 100 microns to thousands of microns, it is limited by the length-to-width ratio (L / W) of the comb teeth, and the width W of the comb teeth needs to reach 10 to tens of microns. The manufacturable number of comb teeth N decreases sharply, and the driving torque of the comb teeth is difficult to increase linearly with the increase of the driver chip size

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