Tunable VCSEL laser chip and manufacturing method thereof

Abstract

The invention relates to a tunable VCSEL laser chip and a manufacturing method thereof. The tunable VCSEL laser chip comprises a single crystal substrate, a single crystal substrate front surface unit, a single crystal substrate back surface unit and two electrodes; the single crystal substrate front surface unit grows on the front surface of the single crystal substrate, emits laser and comprisesan epitaxial layer, an N-ohmic contact layer, a P-ohmic contact layer and an optical passivation layer; the single crystal substrate back surface unit is subjected to secondary epitaxial growth on the back surface of the single crystal substrate, tunes the laser wavelength and feeds back the chip temperature, and sequentially comprises an insulating layer and an atomic layer thermopile layer which are subjected to inclined epitaxial growth, the insulating layer has an insulating layer epitaxial inclination angle, and the atomic layer thermopile layer has an atomic layer thermopile layer epitaxial inclination angle; a first inclination angle difference exists between the atomic layer thermopile layer epitaxial inclination angle and the insulating layer epitaxial inclination angle; and thetwo electrodes are distributed on the two sides of the atomic layer thermopile layer along the inclination direction of the atomic layer thermopile layer. According to the tunable VCSEL laser chip andthe manufacturing method thereof, wavelength tuning and temperature feedback functions can be achieved at the same time.

Description

technical field [0001] The invention belongs to the technical field of semiconductor lasers, in particular to a tunable VCSEL laser chip and a manufacturing method thereof. Background technique [0002] The existing technology related to this case is mainly Vertical Cavity Surface Emitting Laser (VCSEL for short) technology. Due to the short cavity length of the VCSEL laser, only a single longitudinal mode can be set in the entire gain region, making continuous wide-range wavelength tuning possible, and the output aperture of the VCSEL is similar to that of a single-mode fiber, and the coupling efficiency with the fiber is higher. Made into a high-density laser array, these advantages make it a research hotspot in the field of international optical communication devices. [0003] However, at present, VCSEL lasers based on variable temperature tuning usually use a temperature tuning unit, which is generally a semiconductor cooler (Thermal electric cooler, TEC for short), whi...

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Problems solved by technology

[0003] However, at present, VCSEL lasers based on variable temperature tuning usually use a temperature tuning unit, which is generally a semiconductor cooler (Thermal electric cooler, TEC for short), which has a large volume, low integration of chips, devices and modules, slow modulation rate, and Unable to timely measure and feedback compensation for chip temperature changes during work

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