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Operation method for preventing crystal bar from falling and crystal growing furnace with clamping device for preventing crystal bar from falling

A technology of a crystal growth furnace and a clamping device, applied in the mechanical field, can solve problems such as silicon leakage, and achieve the effects of reducing potential safety hazards, facilitating promotion, and solving serious property losses.

Inactive Publication Date: 2020-12-15
浙江晶阳机电股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Silicon rods falling into the quartz crucible will eventually cause silicon leakage accidents, and even cause major property losses and personnel safety accidents

Method used

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  • Operation method for preventing crystal bar from falling and crystal growing furnace with clamping device for preventing crystal bar from falling
  • Operation method for preventing crystal bar from falling and crystal growing furnace with clamping device for preventing crystal bar from falling
  • Operation method for preventing crystal bar from falling and crystal growing furnace with clamping device for preventing crystal bar from falling

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Embodiment Construction

[0023] The technical solutions of the present invention will be further described below in conjunction with the embodiments and the accompanying drawings.

[0024] as the picture shows,

[0025] An operation method for preventing crystal rods from falling, comprising the following steps

[0026] When the S1 monocrystalline silicon rod breaks from the seed crystal or the seed crystal rope 41 in the auxiliary chamber, the load cell and the position sensor double detect the drop signal of the single crystal silicon rod, and the PLC sends a clamping action signal;

[0027] S2 The clamping device 20 for preventing crystal ingot from falling can be activated instantly and clamp the crystal ingot 50 .

[0028] The crystal growth furnace with a clamping device for preventing crystal rods from falling includes:

[0029] Upper furnace body 10 or isolation valve;

[0030] Anti-crystal ingot drop clamping device 20, a number of anti-crystal ingot drop clamping devices 20 are evenly arr...

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Abstract

The invention provides an operation method for preventing a crystal bar from falling and a crystal growth furnace with a clamping device for preventing the crystal bar from falling. The crystal growthfurnace comprises an upper furnace body or an isolation valve; crystal bar falling prevention clamping devices which are evenly arranged on the upper furnace body or the isolating valve, wherein eachcrystal bar falling prevention clamping device comprises a driving mechanism and a clamping block, an output shaft of each driving mechanism is connected with the corresponding clamping block througha connecting rod, and the clamping blocks are driven by the driving mechanisms to stretch out and draw back in the axis direction of the upper furnace body or the isolating valve. The furnace has thecharacteristics of simple mechanism, convenience in maintenance and high reliability.

Description

technical field [0001] The invention belongs to the technical field of machinery, and relates to an operation method for preventing crystal rod drop and a crystal growth furnace with a clamping device for preventing crystal rod drop. Background technique [0002] Single crystal furnace is the necessary equipment in the process of converting polycrystalline silicon into single crystal silicon, and single crystal silicon is the basic raw material in photovoltaic power generation and semiconductor industry. As the key supporting material of the modern information society, single crystal silicon is one of the most important single crystal materials in the world. It is not only the main functional material for the development of computers and integrated circuits, but also the main functional material for photovoltaic power generation and utilization of solar energy. [0003] In the prior art, during the drawing process of single crystal silicon, the weight of the silicon rod is a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B15/32C30B15/20C30B29/06
CPCC30B15/20C30B15/32C30B29/06
Inventor 杨金海
Owner 浙江晶阳机电股份有限公司
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