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Device and method capable of achieving continuous and efficient cleaning of inner wall of furnace body

A cleaning furnace, high-efficiency technology, applied in cleaning methods and utensils, cleaning methods using liquids, chemical instruments and methods, etc., to achieve the effects of easy disassembly, ingenious design, and convenient operation

Inactive Publication Date: 2020-12-15
哈尔滨科友半导体产业装备与技术研究院有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the research and development of the present invention is to solve the problem of more efficient cleaning of the crucible after use, while ensuring that certain volatile components will not cause harm to the human body. A brief overview of the present invention is given below in order to provide an overview of the present invention. basic understanding of some aspects

Method used

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  • Device and method capable of achieving continuous and efficient cleaning of inner wall of furnace body
  • Device and method capable of achieving continuous and efficient cleaning of inner wall of furnace body
  • Device and method capable of achieving continuous and efficient cleaning of inner wall of furnace body

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specific Embodiment approach 1

[0032] Specific implementation mode one: combine Figure 1-Figure 3 Describe this embodiment, a device that can continuously and efficiently clean the inner wall of the furnace in this embodiment includes a liquid outlet device 1, a sealed collection device 2 and a cleaning head 3, the cleaning head 3 is covered and installed on the top of the liquid outlet device 1, sealed The collection device 2 is slidingly installed in the middle of the liquid outlet device 1, and a sealing ring 4 is arranged between the liquid outlet device 1 and the sealing collection device 2. The sealing collection device 2 is installed at the furnace mouth of the furnace body 6 to be cleaned, and the liquid outlet device is moved and rotated. 1, the cleaning head 3 can be controlled to clean the inside of the furnace body 6 to be cleaned.

specific Embodiment approach 2

[0033] Specific implementation mode two: combination Figure 1-Figure 3 Describe this embodiment, based on specific embodiment one, a device that can continuously and efficiently clean the inner wall of the furnace in this embodiment, the liquid outlet device 1 includes a liquid outlet plate 11, a rotating rod 12 and a liquid storage tank 13, the rotating rod The upper end of 12 is equipped with a liquid outlet plate 11, a plurality of liquid outlet holes 111 are processed on the liquid outlet plate 11, a drainage channel 121 is processed inside the rotating rod 12, a liquid storage tank 13 is installed on one side of the rotating rod 12, and the liquid storage tank 13 passes through The drainage channel 121 inside the rotating rod 12 communicates with the liquid outlet hole 111 on the liquid outlet plate 11, and the liquid storage tank 13 is processed with a pressurization port 131 and a liquid filling port 132, aiming at different deposited impurities, through the liquid fill...

specific Embodiment approach 3

[0034] Specific implementation mode three: combination Figure 1-Figure 3 Describe this embodiment, based on the specific embodiment 1, a device that can continuously and efficiently clean the inner wall of the furnace in this embodiment, the sealing collection device 2 includes a waste liquid tray 21, a sealing sleeve 22 and a waste liquid drainage pipe 23, the waste liquid A sealing sleeve 22 is installed on the outer side of the liquid tray 21, and a limiting through hole 212 is processed at the center of the waste liquid tray 21, the rotating rod 12 is installed in the limiting through hole 212, and a sealing ring is arranged between the rotating rod 12 and the limiting through hole 212 4. A waste liquid drainage groove 211 is processed on the waste liquid tray 21. The waste liquid drainage groove 211 is connected and installed with the waste liquid drainage pipe 23. The waste liquid tray 21 is used to collect the cleaning reagents used after cleaning and pass through the w...

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Abstract

The invention discloses a device and method capable of achieving continuous and efficient cleaning of the inner wall of a furnace body, and belongs to the field of crystal growth. The device comprisesa liquid outlet device, a sealing collection device and a cleaning head, and the cleaning head is wrapped and installed on the top of the liquid outlet device; and the sealing collection device is slidably mounted in the middle of the liquid outlet device, and a sealing ring is arranged between the liquid outlet device and the sealing collection device. The research purpose of the invention is toensure that certain volatile components are harmless to a human body while a crucible can be efficiently cleaned after being used; the device and method capable of achieving continuous and efficientcleaning of the inner wall of the furnace body, and belongs to the field of crystal growth and have the advantages of the simple structure, ingenious design, convenient disassembly and assembly, easyoperation, high airtightness and firm assembly, and are suitable for promotion and application.

Description

technical field [0001] The invention relates to a device and method capable of continuously and efficiently cleaning the inner wall of a furnace, belonging to the field of crystal growth. Background technique [0002] After the crystal growth of SiC and AlN is completed, the impurity components contained in the crucible and the insulation layer will be deposited on the inner wall of the furnace, causing pollution, and will affect the regulation of the temperature field and the temperature distribution of the crystal growth process. After the secondary crystal growth is completed, the inner wall of the furnace is cleaned. However, due to the limitation of the internal structure of the furnace body, it is very difficult to clean it manually; due to the different raw materials used in different crystal materials, the deposited components are also different, and chemical reagents need to be used for cleaning, and some volatile components will be Harmful to the human body. [0...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B08B9/08B08B9/087B08B9/093B08B9/34B08B3/08B08B3/14B08B13/00
CPCB08B9/34B08B9/087B08B9/0856B08B9/093B08B9/0808B08B9/0813B08B3/08B08B3/14B08B13/00
Inventor 不公告发明人
Owner 哈尔滨科友半导体产业装备与技术研究院有限公司
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