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Dichroscope based on sandwich-like structure interface and composite material and preparation method of dichroscope

A composite material and dichroic mirror technology, applied in metal material coating process, instruments, optical components, etc., can solve the problems of difficult preparation and complex process, and achieve the effect of increasing flexibility and improving laser damage threshold.

Active Publication Date: 2020-12-11
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Abstract
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  • Application Information

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Problems solved by technology

However, this method involves the preparation of dozens or even hundreds of nano-thin layers. The more the number of nano-thin layers, the thinner the thickness of the thin layer, the more complicated the process, and the greater the difficulty of preparation.

Method used

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  • Dichroscope based on sandwich-like structure interface and composite material and preparation method of dichroscope
  • Dichroscope based on sandwich-like structure interface and composite material and preparation method of dichroscope
  • Dichroscope based on sandwich-like structure interface and composite material and preparation method of dichroscope

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Embodiment Construction

[0034] The present invention will be further described below in conjunction with the embodiments and accompanying drawings.

[0035] Taking the incident at an angle of 45 degrees, the reflectivity of the s-polarization component at 532nm>99.5%, and the transmittance of the p-polarization component in the 800-1053nm band>98% as an example, it is illustrated that the present invention is based on a sandwich-like interface and composite Dichroic mirrors of materials and methods for their preparation, figure 2 It is a schematic diagram of the deposition rate of several materials in the embodiment. The method includes the following steps:

[0036] ① Coating parameter setting:

[0037] Film system designed according to the required optical performance requirements: S|2D 0.5M(DM) 13D 0.5M 4.45D|Air, where S represents the substrate, and M represents HfO with an optical thickness of λ / 4 (λ refers to the design wavelength of the film system, which is 595nm) 2 and Al 2 o 3 Compos...

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Abstract

The invention discloses a dichroscope based on a sandwich-like structure interface and a composite material and a preparation method of the dichroscope. A material A with the refractive index greaterthan 1.8 and a material B with the optical band gap greater than 6.0 eV are deposited simultaneously through electron beam evaporation technology to form the composite material to replace a single high-refractive-index material in a conventional dichroscope film to serve as a high-refractive-index film layer H, and a single low-refractive-index material C serves as a low-refractive-index film layer L; and by controlling the deposition rate of the material A, the deposition rate of the material B and the deposition rate of the material C, a transition interface of a sandwich-like structure is formed between the high-refractive-index film layer and the low-refractive-index film layer, and the transition interface structure serves as an A+B gradient material layer and AA+C gradient material layer. According to the dichroscope, the interface of the high-refractive-index film layer and the low-refractive-index film layer is designed to be the transition interface of the sandwich-like structure, and the interface bonding force, the laser damage threshold value and other performance of the dichroscope are improved on the premise that the spectral performance of a film is not affected.

Description

technical field [0001] The invention relates to an optical thin film, in particular to a dichroic mirror based on a sandwich-like interface and a composite material and a preparation method thereof. Background technique [0002] Dichroic mirrors are often used as beam splitters, beam combiners or harmonic separation devices, and play an important role in many kinds of lasers. An ideal dichroic mirror not only requires high transmittance in certain wavelength bands and high reflectivity in other wavelength bands, but also requires high laser damage threshold in both wavelength bands. SiO 2 Due to the advantages of low absorption loss, large optical band gap, and high laser damage threshold, it is the most commonly used low-refractive index coating material for dichroic mirrors. HfO 2 and Al 2 o 3 It is a high refractive index material commonly used in the preparation of dichroic mirrors. In contrast, HfO 2 With higher refractive index, using HfO 2 / SiO 2 The design a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/30C23C14/10C23C14/08C23C14/54G02B1/10
CPCC23C14/30C23C14/10C23C14/083C23C14/081C23C14/54G02B1/10
Inventor 朱美萍刘天宝李静平李大伟刘晓凤赵元安邵建达
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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