Test system for multi-port radio frequency microwave chip

Abstract

The invention provides a test system of a multi-port radio frequency microwave chip. The test system comprises an automatic probe station with an objective table, a first table top and a second tabletop; the first table top is positioned above the objective table, and a direct-current probe card is arranged in the central area of the first table top; the second table top is located above the first table top, and a probe seat is arranged on the second table top; the automatic probe station and the probe seat are driven by a servo motor and can respectively perform three-dimensional movement inthe X-Y-Z direction; a PXI-e multifunctional test platform is used for providing a test signal for the direct-current probe card to realize direct-current characteristic test and monitoring of the to-be-tested chip; and a four-port vector network analyzer is used for providing the test signal for the radio frequency probe to realize radio frequency characteristic test of the chip to be tested. The test system of the multi-port radio frequency microwave chip is simple in structure, high in test parameter coverage, high in test efficiency, high in test precision, low in cost and high in test flexibility.

Description

technical field [0001] The invention relates to the technical field of testing, in particular to a testing system for a multi-port radio frequency microwave chip. Background technique [0002] With the rapid development of new-generation communication technologies such as 5G and satellite communications and semiconductor manufacturing processes, the integration of multi-port RF transceiver chips represented by beamforming chips is getting higher and higher, and the number of test ports is increasing. Test systems are required to have higher test parameter coverage and faster test throughput. [0003] The traditional RF transceiver chip testing scheme is: use a DC regulated power supply to provide and measure the DC parameters of the chip, use a vector network analyzer to test the S parameters of the device, use a spectrum analyzer or a noise figure analyzer to test the noise parameters, use a signal source, a signal Analyzer and microwave power meter test power and spectrum...

AI Technical Summary

Problems solved by technology

[0006] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a test system for multi-port radio frequency microwave chips, which is used to solve the problem of complex on-chip test systems for multi-port devices in the prior art, low test parameter coverage, and test problems. Problems such as slow process, poor test accuracy, high cost, and poor test flexibility

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