Silicon-based micro coaxial delay line chip

Abstract

The invention provides a silicon-based microcoaxial delay line chip. The silicon-based microcoaxial delay line chip comprises a first substrate, a second substrate and a third substrate which are packaged and integrated, wherein the first substrate is provided with a first groove and a first through hole array; the second substrate is provided with an annular silicon wafer, and the annular siliconwafer is provided with a second through hole array; the third substrate is provided with a second groove and a third through hole array; the second groove comprises a switching groove and a third groove; the switching groove is provided with a core leading-out structure; the first substrate, the second substrate and the third substrate are bonded through a metal layer, and the first groove, the annular silicon wafer and the third groove form a cavity surrounding the core silicon wafer; and the cavity is filled with air to form a silicon-based micro coaxial delay line structure. According to the silicon-based microcoaxial delay line chip, the core silicon wafer in the micro-coaxial delay line chip can be changed in structural forms such as turning, winding or stacking, so that the length of the transmission line is controlled, and meanwhile, the delay amount of the chip is adjusted.

Description

technical field [0001] The invention belongs to the field of radio frequency microwave technology, and in particular relates to a silicon-based micro-coaxial delay line chip. Background technique [0002] Delay line chips are widely used in technical fields such as radar and communication. The existing delay line chip has the following defects: [0003] 1) When the delay chip of Monolithic Microwave Integrated Circuit (MMIC) has a large amount of delay, the insertion loss of the delayer also increases, and the temperature drift also increases. [0004] 2) The delay chip of the existing MMIC is large in size and has a single function, which makes it difficult to apply the chip in the system, and it is difficult to optimize the system and component indicators. Among them, the coaxial delay line structure also has problems such as large size and inability to integrate . Contents of the invention [0005] In view of this, the embodiment of the present invention provides a s...

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Problems solved by technology

[0005] In view of this, the embodiment of the present invention provides a silicon-based micro-coaxial delay line chip, which aims to solve the problems of large loss, large temperature drift, large volume and inability to integrate in the existing delay line technology

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