Photonic crystal micro-ring modulator chip based on lithium niobate film

Abstract

The invention discloses a photonic crystal micro-ring modulator chip based on a lithium niobate film. The photonic crystal micro-ring modulator chip comprises a chip substrate, a chip lower cladding layer, a waveguide core layer and a chip upper cladding layer. According to the invention, an input optical waveguide, a photonic crystal micro-ring modulation structure and an output optical waveguideare integrated on a waveguide core layer, wherein the photonic crystal micro-ring modulation structure is composed of a single straight-through waveguide and a closed annular waveguide, the straight-through waveguide is of a two-dimensional line defect photonic crystal waveguide structure, the annular waveguide is of a two-dimensional circular lattice annular resonant cavity type photonic crystalwaveguide structure, a modulation electrode is arranged on the annular waveguide, the waveguide core layer is made of a lithium niobate film material, the device size can be greatly reduced and the integration degree can be improved while the high electro-optical coefficient is achieved, the electro-optical effect is enhanced in combination with the photonic crystal waveguide slow light effect, the modulator works at a low driving voltage, and the structural size is further reduced. The modulator chip is simple in manufacturing process and easy to integrate and expand, and has good reliability and performance stability.

Description

technical field [0001] The invention relates to the technical field of integrated optical electro-optical modulators, in particular to a photonic crystal microring modulator chip based on lithium niobate thin film. Background technique [0002] As the core device in many fields such as high-speed optical communication, optical fiber sensing, spectral measurement, and optical storage, optical modulators have developed a variety of devices based on electro-optic, acousto-optic, and magneto-optical effects. The amplitude or phase of the output light can be regulated by the change of the electro-optical modulator, which has certain advantages in terms of energy consumption, speed, inheritance, etc. , The problem of large modulation bandwidth has not been well resolved at present. [0003] Lithium niobate crystal has a large electro-optic coefficient, good physical and mechanical properties, high damage threshold, wide light transmission range and relatively low material cost, a...

AI Technical Summary

Problems solved by technology

Traditional lithium niobate electro-optic modulator chips are mainly based on lithium niobate body materials, which face problems such as large size and power consumption, low integration, high production costs and difficult expansion.

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