A Large Precision Vibration Isolation Platform Based on Air Spring

Abstract

A large-scale precision vibration isolation platform based on air springs, including vibration isolation laboratory space, load platform 1, vertical air spring vibration isolator 2, horizontal air spring vibration isolator 3, high-speed electromagnetic servo valve 6, pneumatic system and control system . The lower panel of the load platform is supported by a vertical air spring vibration isolator and a horizontal air spring vibration isolation; the vertical air spring vibration isolator is responsible for the positive stiffness static load of the platform and local passive vibration isolation; the horizontal air spring The vibration isolator is responsible for the negative stiffness adjustment and active vibration isolation of the platform; the natural frequency of the vibration isolation system is reduced by adjusting the positive and negative stiffness, and the vertical air spring and the horizontal air spring vibration isolator are combined to form active and passive composite control; the air spring Feedback sensors are respectively provided on the vibration isolators to detect the pressure of the air spring cavity and the acceleration of the corresponding position of the load platform; the control system includes a controller, a power unit and a servo valve.

Description

technical field [0001] The invention relates to the technical field of precision vibration isolation, in particular to a large precision vibration isolation platform based on an air spring. Background technique [0002] With the development of advanced science and technology driven by nanotechnology, precision testing and micro-nano manufacturing and processing equipment are widely used in the fields of aerospace, optical electronics, precision machinery manufacturing and non-destructive testing. Precision equipment such as electron beam lithography, focused ion beam, and scanning probe microscope have outstanding performances in precision, vibration resistance, and dynamic stability. They are required to work in an ultra-quiet laboratory environment with low vibration and noise, so the equipment needs to be The foundation is precision vibration isolated. [0003] The disturbing vibration of the laboratory mainly includes foundation vibration, environmental vibration and in...

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Problems solved by technology

[0006] Patent Publication No. CN106763465A, the patent titled "A Six-DOF Active and Passive Damping Platform", uses a hydraulic servo cylinder system vibration damping platform, but it is not suitable for dust-free precision equipment laboratories that require environmental cleanliness

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