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A near-atmospheric electron yield mode X-ray absorption spectrum device and acquisition method

An X-ray and absorption spectrum technology, which is applied in the field of near-atmospheric electron output mode X-ray absorption spectrum devices, can solve the problems of high detection cost and tediousness, and achieve the effects of high accuracy, high analysis value and reference value

Active Publication Date: 2021-07-09
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, there is no in-situ device that can satisfy the detection of samples in multiple states at the same time, such as gas / liquid in-situ cells, which usually can only use the fluorescence yield mode to collect the bulk phase information of a sample in a single state (generally several hundred nanometers). above depth), the process of switching samples or switching states is extremely cumbersome, and limited by the size and material of the in-situ cell, a single in-situ device can only study relatively few systems, and the detection cost is also extremely high

Method used

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  • A near-atmospheric electron yield mode X-ray absorption spectrum device and acquisition method
  • A near-atmospheric electron yield mode X-ray absorption spectrum device and acquisition method
  • A near-atmospheric electron yield mode X-ray absorption spectrum device and acquisition method

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Embodiment Construction

[0042] The present application will be further elaborated below in conjunction with specific embodiments. It should be understood that these examples are only used to illustrate the present application and are not intended to limit the scope of the present application. In addition, it should be understood that after reading the content taught in this application, those skilled in the art may make various changes or modifications to this application, and these equivalent forms also fall within the scope defined by the appended claims of this application.

[0043] Embodiments of the present application relate to a near-atmospheric electron yield mode X-ray absorption spectroscopy device, such as figure 1 As shown, it includes: a monochromator 1 , a light intensity monitoring mechanism 2 , a vacuum isolation light transmission device 3 , a photoelectron spectrometer 5 , a first current detection device 6 , a near-atmospheric pressure gas chamber 7 and a control analysis module 8 ...

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Abstract

The invention relates to a near-atmospheric electron yield mode X-ray absorption spectrum device, comprising: a monochromator, a light intensity monitoring mechanism, a photoelectron energy spectrum device and a near-atmospheric gas chamber, the near-atmospheric gas chamber is provided with a Place the fixed support structure of the sample to be tested, and the fixed support structure is connected with a grounded first current detection device; the control analysis module is respectively connected with the monochromator, the light intensity monitoring mechanism, the photoelectron energy spectrum device, the first current detection device and the second current detection device. The two current detection devices are connected to control the monochromator, and perform processing and analysis according to the light intensity signal of the collected X-ray monochromatic incident light, the first outgoing photoelectron signal and the second outgoing photoelectron signal, and output the result according to the analysis result. X-ray absorption spectrum in electron yield mode. The invention can detect the state of the sample under the near normal pressure condition which is close to the real situation without adding an in-situ device.

Description

technical field [0001] This application relates to an X-ray absorption spectrum experimental device, in particular to a near-atmospheric electron yield mode X-ray absorption spectrometer device and a collection method, which can simultaneously collect all electron yields in the range of high vacuum to near-atmospheric pressure. X-ray absorption spectra of the electron yield mode and partial electron yield / Auger electron yield mode. Background technique [0002] X-ray absorption spectroscopy (also known as X-ray absorption fine structure spectroscopy) is one of the important experimental methods for studying the electronic structure of materials. It collects and analyzes the photoelectrons escaping from the sample surface through the electron yield detector, and can obtain sensitive electronic structure and chemical structure information of the surface. [0003] Compared with the X-ray absorption spectroscopy method in the fluorescence mode (the detection depth is generally ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N23/2273G01N23/2204
CPCG01N23/2204G01N23/2273
Inventor 章辉李小宝汪威刘志
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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