MEMS piezoelectric sensor for measuring curvature of micro-scale charging detonation wave front

Abstract

The invention provides an MEMS piezoelectric sensor for measuring the curvature of a micro-scale charging detonation wave front. The MEMS piezoelectric sensor comprises a substrate, a lower output electrode and a lower bonding pad are sputtered on the substrate, and the lower output electrode and the lower bonding pad are connected through a lower wire to form a lower output layer; the lower output layer is spin-coated and cured to form a PVDF-TrFE thin film layer, silicone oil bath polarization is performed on the PVDF-TrFE thin film layer, a PVDF-TrFE sensitive element is obtained through ion etching, and a PVDF-TrFE piezoelectric layer is formed; an upper-layer output electrode and an upper-layer bonding pad are sputtered on the PVDF-TrFE piezoelectric layer, and the upper-layer outputelectrode and the upper-layer bonding pad are connected through an upper-layer wire to form an upper-layer output layer; the lower-layer output electrode and the upper-layer output electrode are arranged in an up-down axial alignment manner; the lower-layer bonding pad and the upper-layer bonding pad are connected through a lower-layer wire and an upper-layer wire and are vertically arranged; theupper output layer is coated with a protective layer; the sensor has the characteristics of small sensitive element size, high precision, multi-point acquisition and the like, and is suitable for measuring the curvature of the micro-scale charging detonation wave front under various test conditions.

Description

technical field [0001] The invention belongs to the technical field of piezoelectric sensors, and in particular relates to a MEMS piezoelectric sensor for measuring the curvature of a microscale charge detonation wave front. Background technique [0002] With the needs of national defense science and technology applications, traditional pyrotechnics technology has been integrated into micro-electromechanical system technology, micro-nano energetic material technology and other high-tech technologies to form a new type of pyrotechnics with the main characteristics of sequence integration, energy conversion informationization, and structural miniaturization. In China, pyrotechnic products with such characteristics are called fourth-generation pyrotechnic products. Compared with traditional pyrotechnics, the design and application of new pyrotechnics usually include the energy transfer and response characteristics of energetic materials under the condition of micro-scale charge...

AI Technical Summary

Problems solved by technology

The high-speed photography method is to record the luminous trajectory of the detonation wave front along the charging direction by means of high-speed scanning of the framing camera, and obtain the curvature of the detonation wave front through the analysis and calculation of the luminous trajectory, but the test system is complex and expensive, and the data The cumbersome limitations prevent it from being widely used in micro-scale charge detonation wave front curvature testing

The optical fiber method detonation wave front curvature test is to determine the position-time relationship of the detonation wave by the time difference when multiple optical fiber probes installed at the front of the detonation wave front receive a certain intensity of optical power, and further calculate the detonation wave front curvature. Wavefront curvature, the method has the following problems. First, the optical fiber needs to be fixed axially based on the grain, which makes it difficult to accurately locate the radial port position of the optical fiber. The position of the optical fiber is non-repeatable, which affects the accuracy of the data. Factors such as uniformity and fiber length all have a certain influence on the acquisition of optical power signals

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