Instant heating type ion pump maintenance device
An ion pump and U-shaped technology, which is applied in the field of instant ion pump maintenance devices, can solve the problems of uneven heating, long heating time, and inability to fix, and is convenient for wide-scale popularization and application, simple production, and maintenance cost saving. Effect
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[0027] Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation modes, and various modifications or changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention.
[0028] The invention relates to an instant heating ion pump maintenance device, which relates to the field of ion pump maintenance, in particular to the rapid recovery technology of an adsorption ion pump. A new method of ion pump maintenance is proposed, which is used to accelerate the rapid recovery function of the ion pump. The instant heat ion pump maintenance device mainly uses two thermistor aluminum shell heaters, two high temp...
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