A miniaturized high-precision laser beam pointing stabilization device

Abstract

The invention discloses a miniaturized high-precision laser beam pointing stabilization device, which includes an adjustable aperture diaphragm, a two-dimensional fast control mirror, a beam splitting prism, a half wave plate, a polarization beam splitting prism, a rhomboid prism, Lenses, photoelectric sensing devices, reflective components, nano mobile platforms and controllers and other components; it uses the reflection characteristics of polarized beams near the total reflection angle as an angle-sensitive detection method, combined with fast control mirrors to achieve angular direction deviation independent corrections. The drift in the position direction is corrected by a reflective component and a position detector. The present invention achieves miniaturized, high-precision, and fast light beam stabilization control by removing the dependence of angle measurement on the optical path, combined with separate control; the stable light beam adjusted by the device of the present invention can be widely used in super-resolution microscopy Imaging system and high-precision laser direct writing lithography system.

Description

technical field [0001] The invention belongs to the field of ultra-precision optical measurement and control, in particular to a miniaturized high-precision laser beam pointing stabilization device. Background technique [0002] With the continuous development of nanotechnology, the demand for processing nanoscale structures in various industries is increasing day by day. Laser direct writing processing technology, as an important three-dimensional nanostructure processing method, has been widely used in many modern scientific and technological fields. application. The development of dual-beam super-resolution laser direct writing nanoprocessing technology has realized the processing resolution beyond the optical diffraction limit, greatly improved its processing accuracy, and provided a new development direction for three-dimensional nanostructure processing technology and its application. The dual-beam super-resolution laser direct writing technology mainly uses the nonli...

AI Technical Summary

Problems solved by technology

However, in the detection and adjustment of angle offset and position offset in this method, the mutual crosstalk is relatively large.

The detection accuracy based on the detector is affected by the shape of the spot, the energy distribution of the spot, the minimum unit size of the detection surface, etc., and its calibration accuracy for the beam is limited

And it requires a relatively long optical path, which leads to a large device volume, and it is very complicated to use in multi-beam parallel writing

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