Rapid deflection mirror driven by Maxwell force

Abstract

The invention discloses a rapid deflection mirror driven by a Maxwell force. The deflection mirror comprises a reflector, a Maxwell force actuator, a flexible support system, an angle detection systemand an outer frame assembly, wherein the reflector is installed in a center of a reflector support, the Maxwell force actuator includes a ring armature and four electromagnetic units, the ring armature is fixedly connected with the reflector support, each electromagnetic unit is composed of a permanent magnet, a coil winding and a stator core, and the four electromagnetic units form four permanent magnet magnetic circuits and eight alternating current magnetic circuits; the flexible support system mainly includes a flexible diaphragm and an axial flexible piece, recovery torque is provided for an actuating torque to achieve angle control, the flexible diaphragm supports the ring armature on four side surfaces, and the axial flexible piece supports the ring armature in the center of a lower end; and four non-contact capacitance displacement sensors in the angle detection system are uniformly distributed in four directions to detect a steering angle of the reflector in real time and generate angle feedback control and angle closed-loop control. The deflection mirror is high in force density, compact in structure and convenient to machine and manufacture.

Description

technical field [0001] The invention belongs to the field of precision tracking for precision optical platforms, has a vertically symmetrical electromagnetic structure and a novel armature structure, and specifically relates to a fast deflection mirror driven by Maxwell force. Background technique [0002] As a key device in the optical system, the fast control yaw mirror has been widely used in the fields of adaptive optics, precision tracking, target pointing, beam control and optical communication, and can be assembled in the electromechanical flip / tilt system. The function is to realize the fast and high-frequency rotation of the plane mirror, and then achieve the purpose of timely adjusting the beam tilt error, correcting the propagation direction of the optical path and stabilizing the beam. Most of the fast mirrors on the market are driven by piezoelectric ceramics or voice coil motors, and the stroke of piezoelectric ceramics is very small, only tens of microns, but ...

AI Technical Summary

Problems solved by technology

Most of the fast mirrors on the market are driven by piezoelectric ceramics or voice coil motors, and the stroke of piezoelectric ceramics is very small, only tens of microns, but the driving voltage is as high as hundreds of volts; the driving voltage of voice coil motors is more than ten volts, but less force density

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