Conveying walking device for annealing processing of semiconductor electronic device

Abstract

The invention discloses a conveying walking device for the annealing processing of semiconductor electronic devices and belongs to the technical field of electronic product processing. The conveying walking device for the annealing processing of the semiconductor electronic device comprises a furnace body shell; supporting plates are fixed to the inner walls of the front side and the rear side ofthe furnace body shell; toothed plates are slidably connected to the supporting plates; a plurality of teeth are integrally formed on the lower surfaces of the toothed plates; a plurality of semicircular grooves are formed in semiconductor tube placement grooves; a rotating shaft is inserted into the inner walls of the front side and the rear side of the furnace body shell; an outer gear is rotationally connected to the outer wall of the rotating shaft and is located below the teeth; the outer gear is meshed with the teeth; an inner edge ratchet wheel is coaxially fixed to the front side wallof the outer gear; the one-way intermittent conveying of to-be-machined semiconductor tubes can be achieved; manual operation is not needed for conveying the semiconductor tubes; due to the fact thatintermittent conveying can be achieved, the annealing treatment effect of the semiconductor tubes is guaranteed; and in addition, the stability of the whole device is high, and a deflection phenomenonis avoided.

Description

technical field [0001] The invention relates to the technical field of electronic product processing, and more specifically relates to a conveying and traveling device for annealing processing of semiconductor electronic devices. Background technique [0002] Semiconductor devices usually use different semiconductor materials, adopt different processes and geometric structures, and have developed a variety of crystal diodes with different functions and uses. The frequency coverage of crystal diodes can range from low frequency, high frequency, microwave, mm wave, infrared to light wave. Three-terminal devices are generally active devices, typically represented by various transistors (also known as transistors). Transistors can be further divided into bipolar transistors and field effect transistors. According to different uses, transistors can be divided into power transistors, microwave transistors, and low-noise transistors. In addition to general transistors used for a...

AI Technical Summary

Problems solved by technology

[0004] When the existing annealing furnace anneals the semiconductor device, it needs to manually carry out intermittent feeding, but cannot realize the intermittent delivery of the material, which greatly affects the working efficiency of the semiconductor annealing process, and the annealing furnace will produce during the working process. A lot of exhaust gas, usually these exhaust gases will be discharged directly, resulting in a waste of energy

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