Laser capable of directly generating two paths of coherent light
A laser and coherent light technology, applied in lasers, laser parts, phonon exciters, etc., can solve the problems affecting the effect and quality of interference processing, phase and polarization state changes, inconsistent light intensity, etc., and achieve good interference processing effect. , high reliability and low cost
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[0030] Hereinafter, specific embodiments of the present application will be described in detail with reference to the accompanying drawings. According to these detailed descriptions, those skilled in the art can clearly understand the present application and can implement the present application. Without departing from the principle of the present application, the features in different embodiments can be combined to obtain new implementations, or some features in certain embodiments can be replaced to obtain other preferred implementations.
[0031] The traditional Mach-Zehnder interference lithography apparatus is a dual-beam interference lithography device, and the calibration process is cumbersome. It is necessary to precisely adjust the position of each lens in the optical path, and can only process a single period of nanostructures at a time. If you want to process other periods of Nanopatterns need to readjust the entire set of optical paths, and the process is complicate...
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