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266nm solid-state laser and its beam quality optimization method

A 266nm, solid-state laser technology, applied in the laser field, can solve the problems that solid-state lasers cannot effectively balance the cost of laser beam quality and service life, high cost of CLBO crystals, and poor quality of outgoing light beams, so as to improve output beam quality and reduce maintenance cost, and the effect of extending the service life

Active Publication Date: 2021-11-12
RAINBOW SOURCE LASER RSLASER
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Problems solved by technology

[0004] In order to solve the problem of obtaining 266nm high-power ultraviolet laser in the prior art, because the existing BBO crystal has a large dispersion angle, the quality of the outgoing light beam is poor, and the CLBO crystal is high in cost and easy to deliquescence and has a short life, the solid-state laser cannot be effectively balanced. The technical problems of cost, laser beam quality and service life, the invention provides a kind of 266nm solid-state laser and its beam quality optimization method

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  • 266nm solid-state laser and its beam quality optimization method
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  • 266nm solid-state laser and its beam quality optimization method

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[0024] In order to make the objects, technical solutions, and advantages of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings.

[0025] It should be noted that in the figures or instructions, unluckled or described implementations are all known to those skilled in the art, and the detailed description is not performed. Furthermore, the definition of each of the above components and methods is not limited to various specific structures, shapes, or methods mentioned in the embodiments, and those skilled in the art can simply change or replace them.

[0026] It will also be noted that the direction term mentioned in the examples, such as "upper", "lower", "front", "post", "left", "right", etc., is only the direction of the accompanying drawings, not It is used to limit the scope of protection of the present disclosure. Throughout the drawings, the same elements are indicated by the same or similar refere...

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Abstract

The invention provides a 266nm solid-state laser and a beam quality optimization method thereof, wherein the 266nm solid-state laser includes a first frequency doubling structure and a second frequency doubling structure; After the first frequency doubling structure, it is used to receive the 532nm laser beam formed by the first frequency doubling structure and convert it into a 266nm high-power ultraviolet laser beam; wherein, the second frequency doubling structure includes a quadruple frequency doubling crystal component, and the quadruple frequency doubling crystal The component is composed of a combination of the first BBO crystal, CLBO crystal and the second BBO crystal arranged in sequence along the laser exit optical path, and is used for frequency doubling conversion of the 532nm laser beam exiting along the laser exit optical path to obtain 266nm high-power ultraviolet Laser beam. Therefore, based on the 266nm solid-state laser of the present invention, under the condition that the 266nm laser power output is guaranteed, two nonlinear crystal cascading methods of BBO crystal and CLBO crystal are used to improve the output beam quality and prolong the service life of the crystal at the same time and reduced laser cost.

Description

Technical field [0001] The present invention relates to the field of laser light, and more particularly to a 266 nM solid laser based on nonlinear crystals and a beam quality optimization method thereof. Background technique [0002] At present, as an important method of obtaining high power ultraviolet lasers, multiplier conversion technology has received more and more attention. Among them, the laser power and beam mass based on the crystal is closely related to the material, structure, and corresponding characteristics of the crystal itself. Typically, in frequency conversion techniques, the nonlinear crystals typically employed are primarily BBO and CLBO crystals for the purpose of reaching 532 nm to 266 nm laser conversion. BBO crystals and CLBO crystals have a high transmittance for 532 nm and 266 nm. Among them, BBO crystals have low cost relative to CLBO crystals, high effective nonlinear coefficients, low hroemption properties, better chemical stability, and matching tem...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01S3/109H01S3/02H01S3/07H01S3/102
CPCH01S3/027H01S3/07H01S3/1028H01S3/109
Inventor 陈彬彬王家赞江锐任俊杰刘广义
Owner RAINBOW SOURCE LASER RSLASER
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