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MEMS gas sensor, array thereof, gas detection method and preparation method

A gas sensor and gas detection technology, which can be used in electric solid state devices, semiconductor devices, fluid velocity measurement, etc., and can solve the problems of high power consumption and fast heat dissipation.

Active Publication Date: 2020-06-16
HEFEI MICRO NANO SENSING TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the above types of gas sensors still have the problems of faster heat dissipation and higher power consumption.

Method used

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  • MEMS gas sensor, array thereof, gas detection method and preparation method
  • MEMS gas sensor, array thereof, gas detection method and preparation method
  • MEMS gas sensor, array thereof, gas detection method and preparation method

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Embodiment Construction

[0082] The application describes a number of embodiments, but the description is illustrative rather than restrictive, and it will be obvious to those of ordinary skill in the art that within the scope of the embodiments described in the application, There are many more embodiments and implementations. Although many possible combinations of features are shown in the drawings and discussed in the detailed description, many other combinations of the disclosed features are possible. Except where expressly limited, any feature or element of any embodiment may be used in combination with, or substituted for, any other feature or element of any other embodiment.

[0083] This application includes and contemplates combinations of features and elements known to those of ordinary skill in the art. The disclosed embodiments, features and elements of this application can also be combined with any conventional features or elements to form unique inventive solutions as defined by the clai...

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Abstract

The embodiment of the invention discloses an MEMS gas sensor, an array thereof, a gas detection method and a preparation method. The gas sensor comprises a first substrate provided with a cavity on afirst surface and a gas detection assembly which is arranged at the opening of the cavity and comprises a supporting suspension bridge erected on the opening of the cavity and a gas detection part arranged on the supporting suspension bridge; the gas detection part comprises a strip-shaped heating electrode part, an insulating layer, a strip-shaped detection electrode part and a gas sensitive material part which are stacked in sequence; the strip-shaped detection electrode part comprises a first detection electrode part and a second detection electrode part; a first opening is formed between the first detection electrode part and the second detection electrode part; the gas sensitive material part is arranged at the first opening, the first end of the gas sensitive material part is connected with the first detection electrode part, and the second end of the gas sensitive material part is connected with the second detection electrode part. According to the scheme of the embodiment, thesupporting suspension bridge serves as a sensing part of the gas sensor, the thermal mass is small, and power consumption is low.

Description

technical field [0001] This article relates to but not limited to the technical field of gas detection, especially a MEMS gas sensor and its array, gas detection and preparation method. Background technique [0002] Odor recognition is one of the important application fields of gas sensors. Since different gases have different characteristics and each sensor has different responses to different gases, existing odor recognition devices or electronic nose devices usually use multiple types of Gas sensors build a multi-channel sensor array, each sensor is used to monitor a specific gas. Metal-oxide-semiconductor gas sensors are widely used in odor recognition equipment due to their superior characteristics such as low power consumption, low cost, high integration, and good response to various gases. [0003] Traditional MOS (Metal Oxide Semiconductor) MEMS (Micro-Electro-Mechanical Systems) gas sensors are mainly based on closed-membrane and suspended-membrane research. The fo...

Claims

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Application Information

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IPC IPC(8): G01N27/12B81B7/02B81B7/00B81C1/00
CPCG01N27/128G01N27/125B81B7/02B81B7/0009B81C1/0069B81C1/00642B81B2201/02B81B2203/0109B81B7/04B81B2201/0292G01N33/0031
Inventor 许磊谢东成陈栋梁
Owner HEFEI MICRO NANO SENSING TECH CO LTD
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