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Supporting frame, fixing frame and mask plate

A technology of support frame and fixed frame, which is applied in the direction of electric solid device, semiconductor/solid device manufacturing, vacuum evaporation plating, etc., and can solve the problems of poor alignment accuracy and failure of alignment marks

Pending Publication Date: 2020-06-16
CHENGDU BOE OPTOELECTRONICS TECH CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The embodiment of the present invention provides a support frame, a fixing frame and a mask plate, which are used to solve the problem of poor alignment accuracy or failure of the alignment mark during the evaporation process

Method used

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  • Supporting frame, fixing frame and mask plate
  • Supporting frame, fixing frame and mask plate
  • Supporting frame, fixing frame and mask plate

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Embodiment Construction

[0035] In order to make the purpose, technical solution and advantages of the present invention more clear, the embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined arbitrarily with each other.

[0036] In the OLED production process, evaporation is the link that most affects its yield. figure 1 is a structural diagram of a mask plate in the related art, figure 2 It is a combined structural diagram of the base frame and the support frame in the related art. In order to accurately vapor-deposit the evaporation material on the substrate, a base frame (Frame) 11 , a support frame (Full Mask) 20 , an alignment strip (Align Mask) 30 and a fine metal mask (FineMetal Mask, FMM) 40 need to be used together. First, the support frame 20 is fixed on the base frame 11 by stret...

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Abstract

The invention discloses a supporting frame, a fixing frame and a mask plate, and relates to the technical field of display. The supporting frame comprises a supporting frame, supporting strips and multiple of extending parts; an evaporation area is defined in the supporting frame; the supporting strips are arranged on the supporting frame and located in the evaporation area; and the extending parts are arranged in the circumferential direction of the supporting frame and extend in the direction away from the evaporation area, and alignment marks used for aligning the mask plate with a substrate in the evaporation process are arranged on the extending parts. According to the embodiment, the extending parts are arranged on the supporting frame, and the alignment marks are arranged on the extending parts, so that the alignment marks are effectively prevented from losing efficacy or reducing the precision, the stability of the alignment marks is improved, and the product scrap risk is reduced.

Description

technical field [0001] The present invention relates to the field of display technology, and more particularly, to a support frame, a fixing frame and a mask plate. Background technique [0002] Organic Light Emitting Diode (OLED) devices have excellent features such as ultra-thin, self-illuminating, organic materials, planar structure, low-temperature manufacturing process, and compatibility with plastic substrates, and can be used as display panels. [0003] In the OLED production process, evaporation is the link that most affects its yield. The basic process of evaporation is: the organic material and cathode material evaporated by heating are evaporated onto the substrate through a mask plate to form a light-emitting structure. In order to accurately vapor-deposit the evaporation material on the substrate, the mask plate includes a base frame and a support frame fixed on the base frame in turn, a calibration bar and a fine metal mask, wherein the calibration bar is prov...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C14/24H01L51/56
CPCC23C14/042C23C14/24H10K71/166H10K71/00
Inventor 赵艳秋杨忠英宗涛覃松绿谭文刘聪
Owner CHENGDU BOE OPTOELECTRONICS TECH CO LTD
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