Full-suspension small-capacitance detector, control method and application

Abstract

The invention belongs to the technical field of photoelectric detectors, and discloses a full-suspension small-capacitance detector, a control method and application. The full-suspension small-capacitance detector is characterized in that a detector array is provided with a plurality of detector units which are distributed in an array; the detector unit is provided with an N-type lightly doped silicon substrate, a P-type heavily doped cathode layer is arranged on the upper surface of the silicon substrate, a P-type heavily doped floating electrode layer is arranged at an interval with the cathode layer, and an N-type heavily doped anode layer is arranged on the lower surface of the silicon substrate; a silicon dioxide layer is laid on the upper surface of the floating electrode layer; andan Al electrode layer is laid on the surfaces of the cathode layer and the anode layer. According to the invention, the detector array with ultrahigh energy resolution and position resolution and ultrafast time response capability is realized. The floating electrode design is adopted, the electrode area is greatly reduced, the detector capacitance is reduced, and the noise is reduced. Meanwhile, the array dead zone of the detector is reduced, and the charge collection rate and detection efficiency are improved.

Description

technical field [0001] The invention belongs to the technical field of photoelectric detectors, and in particular relates to a fully suspended small capacitance detector, a control method and an application thereof. Background technique [0002] At present, the closest existing technology in the industry is: detectors are mainly used in technical fields such as high-energy physics, astrophysics, aerospace, military, medicine, and pulsar navigation. Traditional silicon detectors have large capacitance, high leakage current, high noise, and low charge collection rate. Traditional silicon detector arrays are small and cannot meet the increasing detection requirements (higher energy resolution and position resolution and faster time response capability). Countries such as Europe and the United States have been monopolizing and blocking my country's semiconductor chip manufacturing industry on talent, technology, and products; my country's silicon detectors for particle physics ...

AI Technical Summary

Problems solved by technology

[0004] (1) Traditional silicon detectors have large capacitance, high leakage current, high noise, and low charge collection rate

[0005] (2) The traditional silicon detector array is small and cannot meet the needs of higher energy resolution and position resolution and faster time response capability

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