MEMS micro loudspeaker, preparation method thereof and electronic equipment
A micro-speaker and piezoelectric technology, which is applied in the field of microelectronics, can solve the problems of MEMS micro-speakers, which are large in size and do not meet the needs of miniaturization.
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[0049] In order to make the purpose, technical solutions, and advantages of this application clearer, the following further describes this application in detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the application, but not to limit the application.
[0050] In the description of this application, it should be understood that the terms "center", "lateral", "upper", "lower", "left", "right", "vertical", "horizontal", "top", " The orientation or positional relationship indicated by “bottom”, “inner”, and “outer” are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the application and simplifying the description, rather than indicating or implying the device or The element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood a...
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