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Methods for micro and NANO fabrication by selective template removal

A technology of templates and nanostructures, applied in chemical instruments and methods, nanotechnology for materials and surface science, nanotechnology, etc., can solve problems such as limiting the robustness and imperfection of structures

Active Publication Date: 2020-03-17
NANOTECH SECURITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Thus, such lift-off techniques often undesirably limit the structural robustness of the final product, the maximum yield for industrial implementation of the method, the choice of template material and / or its anti-adhesion surface treatment, and the type of thin film material deposited.

Method used

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  • Methods for micro and NANO fabrication by selective template removal
  • Methods for micro and NANO fabrication by selective template removal
  • Methods for micro and NANO fabrication by selective template removal

Examples

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Embodiment Construction

[0048] In one embodiment of the present invention, a method of fabrication is provided for fabricating (i) a perforated film having micro- or nanostructured perforations on the surface of a substrate, and (ii) encapsulating shaped and positioned Micro or nano structured particles.

[0049] In a particular embodiment of the present invention, the method of manufacturing a perforated thin film coating from a thin film layer uniformly deposited on a template substrate having raised structures, such as micro and / or nanostructured tops or vertices, may comprise the use of hardened Resin or polymer potting material to encapsulate and subsequently remove the encapsulated micro- or nanostructured thin-film cap to selectively remove the cap portion of the thin-film coating on the template.

[0050] In another embodiment of the invention, removal of the hardened resin or polymer potting material comprising the encapsulated thin film micro- and / or nanostructured caps desirably creates a ...

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PUM

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Abstract

A method to remove selected parts of a thin-film material otherwise uniformly deposited over a template is disclosed. The methods rely on a suitable potting material to encapsulate and snatch the deposited material on apexes of the template. The process may yield one and / or two devices during a single process step: (i) thin-film material(s) with micro- and / or nano-perforations defined by the shapeof template apexes, and (ii) micro- and / or nano-particles shaped and positioned in the potting material by the design of the template apexes. The devices made from this method may find applications in fabrication of mechanical, chemical, electrical and optical devices.

Description

technical field [0001] The present invention generally relates to methods of fabricating micro- and nanostructures. More specifically, the present invention relates to methods of fabricating microstructures and nanostructures by selectively removing thin film materials deposited on micro- or nanostructure templates. Background technique [0002] In conventional micro- and nano-manufacturing, there are a variety of situations where it may be desirable to fabricate specific patterns of thin film materials. Examples could include producing micro- or nanostructured patterned thin-film electrical contacts on electronic chips; micro- or nanostructured patterned perforated metal films in plasmonic devices; for photovoltaic cells, plasmonic devices, metamaterial devices, optical filtering Micro- or nanostructured textured electrodes for sensors, biosensors, gas detectors, optical polarizers, displays, document security features, etc. [0003] In conventional micro- and nanoprocess...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81C1/00B81B1/00B82Y30/00B42D25/36B42D25/40G02B5/30H01L31/0224
CPCH01L31/022425B42D25/40B42D25/36B81C1/00031B81B2203/0353B81B2203/0361B81B2207/056G02B5/1809B82Y40/00H01L21/0337B29C41/02B81C99/0085B82B3/0033
Inventor 莫赛·凯沙瓦兹阿卡拉基克林顿·兰德洛克
Owner NANOTECH SECURITY
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