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A device for removing voc and reducing odor from waste gas

A technology for waste gas and odor, which can be used in gas treatment, air quality improvement, combustion type, etc., and can solve the problems of low heat recovery rate and large heat exchanger volume.

Active Publication Date: 2021-08-13
SAMSUNG ENGINEERING CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0024] However, the shell and tube heat exchanger (shell and tube heat exchanger) provided in the high temperature recovery thermal oxidizer 20 has a very low heat recovery rate of 40% to 70%, even if the oxidation temperature is slightly lowered to 1400°F (760°F). ℃) and then operate, still discharge high temperature exhaust gas around 350 ℃
Improving heat recovery efficiency also has the problem of excessive heat exchanger volume

Method used

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  • A device for removing voc and reducing odor from waste gas
  • A device for removing voc and reducing odor from waste gas
  • A device for removing voc and reducing odor from waste gas

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Embodiment Construction

[0064] A device for removing VOC (volatile organic compound) and reducing odor from exhaust gas according to an embodiment of the present invention will be described in detail below with reference to the accompanying drawings.

[0065] Herein, "VOC" means an organic chemical having a high vapor pressure at normal temperature (20°C to 25°C).

[0066] In addition, herein, "waste gas" means waste gas discharged in a semiconductor process and the like.

[0067] In addition, herein, "treated gas" means a gas that has been treated by thermal oxidation and / or catalytic oxidation of exhaust gas.

[0068] In addition, in this paper, "thermal oxidation" means a reaction that decomposes exhaust gas at a higher temperature than catalytic oxidation, and the hydrocarbon pollutants (such as VOC) in the exhaust gas are decomposed by thermal combustion (thermal combustion) Chemically oxidized to carbon dioxide and water.

[0069] In addition, in this paper, "catalytic oxidation" means a proc...

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Abstract

The invention discloses a device for removing VOC (volatile organic compound) from waste gas and reducing odor. The device for removing VOC and reducing odor from exhaust gas includes: a thermal oxidation chamber and a catalytic oxidation chamber connected in series, the thermal oxidation chamber is configured to generate a combustion reaction of fuel and air and an oxidation reaction of VOC, and the catalytic oxidation chamber The oxidation chamber is configured to undergo an oxidation reaction of VOCs.

Description

technical field [0001] The invention discloses a device for removing VOC from exhaust gas and reducing odor, and discloses in more detail a device for removing VOC from exhaust gas and reducing odor, which includes thermal oxidation chambers and catalytic oxidation chambers connected in series. Background technique [0002] Exhaust gas discharged in semiconductor processes and the like is called waste gas. Since this exhaust gas contains VOC (Volatile Organic Compound) which is harmful to the human body, it should be properly treated before it is released into the atmosphere. [0003] As such exhaust gas treatment techniques including VOCs, there are methods of wet scrubbing, adsorption, and combustion (oxidation). However, for wet scrubbing, most VOCs have low solubility in water and high performance cannot be expected, and for adsorption, it requires the use of a large amount of adsorbents (adsorbent), so the installation site is large, the replacement cycle is short, and...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F23G7/06B01D53/86B01D53/44
CPCB01D53/8687B01D2258/0216F23G7/06Y02A50/20
Inventor 洪性勋崔圣洙李晟洙洪在勋
Owner SAMSUNG ENGINEERING CO LTD
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