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Laser Interferometer Receiver

A laser interferometer and receiver technology, applied in the field of measurement, can solve the problems of reduced measurement efficiency and measurement accuracy, inability to realize multi-channel multiplexing function, and single measurement optical path channel, so as to improve measurement efficiency and measurement accuracy, and improve measurement accuracy. Accuracy and measurement efficiency, the effect of improving the signal-to-noise ratio

Active Publication Date: 2021-01-29
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The disadvantage of this laser interferometer receiver is that the bandwidth frequency range of the band-pass filter is too wide, resulting in a large noise signal, which reduces the signal-to-noise ratio. , the multiplexing function of multiple channels cannot be realized, resulting in the defect of reduced measurement efficiency and measurement accuracy

Method used

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  • Laser Interferometer Receiver
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  • Laser Interferometer Receiver

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Experimental program
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Effect test

Embodiment 1

[0043] Please refer to Figure 2 to Figure 5 , the laser interferometer receiver provided by Embodiment 1 of the present invention includes a photoelectric detection unit 210, an I / V conversion unit 220, a multi-channel bandpass filter unit 230, an AGC unit 240, a phase compensation unit 250, a comparator 260, a weak signal suppression unit 270 and control unit 280 .

[0044] Wherein, the photoelectric detection unit 210 is used to detect the interference light signal sent by the laser interferometer and convert it into an analog current signal. The photodetection unit 210 may be a photodiode.

[0045] Please refer to Figure 2 to Figure 4 , the I / V conversion unit 220, configured to convert the analog current signal converted by the photodetection unit 210 into an analog voltage signal.

[0046] Please refer to Figure 2 to Figure 4 , a multi-channel band-pass filter unit 230, configured to select a certain channel of a sub-frequency bandwidth of a narrower frequency rang...

Embodiment 2

[0064] Please refer to Figure 6 , Embodiment 2 of the present invention is improved on the basis of Embodiment 1. The difference is that the multi-channel bandpass filtering unit 230 may also include a summation unit 233, which is used to select a selected channel band The pass filter 232 and a certain channel band-pass filter 232 that is closed at the same time are superimposed and summed to ensure the accuracy of the sum signal obtained, avoiding the noise of the multi-channel band-pass filter unit 230 when the channel is switched, thereby improving the measurement efficiency. efficiency and measurement accuracy. That is, the summation unit 233 can smoothly realize transition switching between channels. The summation unit 233 may employ an adder.

Embodiment 3

[0066] Please refer to figure 2 and Figure 7 , the third embodiment of the present invention is improved on the basis of the first embodiment, the difference is that the multi-channel band-pass filter unit 230 is an adjustable band-pass filter 234 . For example: the overall frequency bandwidth of the adjustable bandpass filter 234 is 0.1-10 MHz, and the adjustable bandpass filter 234 can be adjusted to several sub-frequency bandwidths within the frequency bandwidth of 0.1-10 MHz.

[0067] Please refer to Figure 8 and Figure 9 , the adjustable bandpass filter 234 of the third embodiment of the present invention adopts an LC resonant filter with adjustable frequency bandwidth formed by parallel connection of the inductor L1 and the varactor diode VD1 . At this time, the varactor diode VD1 is used in reverse connection.

[0068] The working principle of the third embodiment of the present invention is basically the same as that of the first embodiment, the difference lies...

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Abstract

The invention provides a laser interferometer receiver, which includes a photoelectric detection unit, an I / V conversion unit, a multi-channel bandpass filter unit, an AGC unit, a phase compensation unit, a comparator, a weak signal suppression unit and a control unit. The invention can not only improve the measurement precision and efficiency, but also increase the number of channels of the measurement light path, and has a high signal-to-noise ratio.

Description

technical field [0001] The invention relates to the field of measurement technology, in particular to a laser interferometer receiver. Background technique [0002] Dual-frequency laser interferometer is a device that uses the interference principle of light to measure displacement with the wavelength of light. It has the advantages of high resolution, strong anti-interference ability, good repeatability, large range, high speed, and non-contact. , so it is widely used in various high-end fields that require precise displacement measurement, such as microelectronics manufacturing, precision machine tool processing, coordinate calibration and positioning. To put it simply, the principle of measuring displacement with a dual-frequency laser interferometer is: two beams of coherent light meet in space, and interference fringes can be generated. If the phase of one of the beams of light remains unchanged, it can be detected by detecting the change of the interference fringes. T...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/02G01B9/02
CPCG01B9/02015G01B9/02055G01B11/02
Inventor 吴候王海江程鹏顾俊范纪铭
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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