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Laser dynamic interferometer

A dynamic interference and laser technology, applied in the field of interferometers, can solve problems such as difficulty in ensuring measurement accuracy, achieve vibration insensitivity, rapid measurement, and reduce the effects of airflow

Active Publication Date: 2020-02-21
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The embodiment of the present invention provides a laser dynamic interferometer to solve the problem that the measurement process of the existing laser interferometer is greatly affected by environmental factors and it is difficult to ensure the measurement accuracy each time

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Embodiment 2

[0055] The above-mentioned process is described below by another example, the present invention according to figure 1 The structure shown is implemented, wherein the collimator lens 4 has an effective focal length of 30mm and is manufactured by Edmund Optics Company, the model number is 49662; the beam splitter 501 is a model product of Newport Company 20BC17MB.1. The excitation wavelength of the laser is variable, ranging from 512nm to 632nm. The unit structure of the liquid crystal variable phaser is related to the pixel of the CCD in a one-to-one correspondence. The above-mentioned combined light of different polarization states will interfere after passing through each unit of the liquid crystal variable phaser, and occur at different pixel positions. The interferometric phases are different. Interference with a fixed phase difference occurs between any adjacent group of 4 pixels, and the phase shift interferometry calculation is performed for each group of pixels, thereb...

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Abstract

The invention belongs to the technical field of laser interferometers, and provides a laser dynamic interferometer. The laser dynamic interferometer comprises a laser, a collimation structure for collimating a laser beam emitted by the laser, a plane mirror, a plane mirror, a 1 / 4 wave plate, a 1 / 4 wave plate, a polarization beam splitter and the like. A crossed micro-polarizer array capable of changing directions freely is adopted and used for generating phase shift at the same time, a mode of combining a liquid crystal phase delayer and a traditional interferometer is adopted, different interference phases can be obtained in cooperation with different polarizer arrays, and therefore, switching measurement is achieved on the basis of original laser interferometer measurement. A polarized light interference principle is adopted, and time domain phase shift of a traditional phase shift interferometer is converted into space domain phase shift, so that full-resolution measurement can be achieved in one CCD frame frequency. According to the invention, the advantages of rapid measurement, insensitivity to vibration, reduction of the influence of airflow and the like which are not possessed by a traditional interferometer are achieved.

Description

technical field [0001] The invention relates to the technical field of interferometers, in particular to a laser dynamic interferometer. Background technique [0002] With the rapid development and application of high-precision optical instruments, the requirements for optical detection accuracy are getting higher and higher. Laser interferometer is a measuring instrument made according to the principle of light interference. The physical quantity is converted into optical path difference, and finally the measured information is reflected by interference fringes. As a measuring instrument, the interferometer has the advantages of high precision, high sensitivity and non-contact measurement. Widely used in parameter measurement of precision optical components. [0003] Traditional laser interferometers mainly include Newton interferometer, Michelson interferometer, Fizeau interferometer, Tyman-Green interferometer and so on. The traditional laser interferometer is greatly ...

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Application Information

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IPC IPC(8): G01B9/02
CPCG01B9/0201G01B9/02055
Inventor 王鹍张海涛于杰金春水
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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