Shutter-type vacuum furnace observation window

Abstract

The invention relates to a shutter-type vacuum furnace observation window. The shutter-type vacuum furnace observation window comprises an observation window cavity which can be arranged on a vacuum furnace observation opening, shutter-type blades which are placed in the observation window cavity, driving connection rod mechanisms which are connected to the blades and are connected to an externaldriving system, driving rod movable sealing mechanisms for ensuring vacuum, a vacuum sealing ring used for sealing observation window glass, an observation window glass lens, an observation window cover for compacting the observation window glass, driving rod execution mechanisms which are placed out of the observation window cavity and are connected to a driving mechanism through movable sealingand controlling and adjusting units and electric connection cables of the execution mechanisms; the shutter-type blades with variable frequencies are used, so that the luminous flux and the exposure frequency can be adjusted at will on the premise of ensuring sufficient luminous flux, and a bright field of view and matching camera scanning are realized, and the effect of eradicating stroboflash isrealized, which is of great benefit to both human eyes and cameras; and by adopting the design, the size of the observation window can be greatly reduced, and the observation window is arranged on avacuum furnace conveniently.

Description

technical field [0001] The invention relates to a vacuum furnace observation window structure and protection method, in particular to a flicker-free observation window structure and protection method that can work continuously for a long time and prevent volatile matter from adhering to the lens. Background technique [0002] In the process of smelting or evaporation processing in the vacuum furnace, the staff often need to observe the materials and working status in the furnace, so as to grasp the situation in the furnace at any time, control and adjust the process and avoid accidents. This is especially important for electron beam melting furnaces and vacuum coating equipment, but various evaporating substances in the furnace are often evaporated and adhered to the lens of the observation window, forming a block, which seriously hinders the operation of the staff. Therefore, a reliable and stable observation window that can protect the observation window from being blocked...

AI Technical Summary

Problems solved by technology

[0004] 1. The blade rotation mechanism is complex and expensive

This method uses the method of a built-in motor in the vacuum chamber to drive the blades to rotate at high speed. Although the problem of vacuum dynamic sealing of the transmission shaft caused by the external motor is avoided, the cost is also greatly increased due to the use of a vacuum motor.

[0005] 2. The observation window is large

Due to the space required for the rotation of the blades, the overall space required for the observation window is much larger than the optical path required for direct observation, and the effective use area is often only 1 / 4 or even less

This makes the arrangement of observation windows take up a large amount of space, and it is often necessary to consider the possible interference with other components, which seriously restricts the choice of arrangement of observation windows

Moreover, the overall weight of the observation window is large, and maintenance and repair operations are difficult

[0006] 3. Since the motor speed drives the blade slit to form the shutter, stroboscopic phenomenon is inevitable

When the operator directly observes, the strobe will cause visual fatigue, which is very unfavorable to the operator who works for a long time

When using a camera for remote monitoring, the speed of the slit shutter is different from the scanning frequency of the camera, often resulting in alternating dark areas on the remote monitoring screen

Images