Silicon single crystal rod cutting surface angle detection device and squaring machine

A single crystal silicon rod and angle detection technology, which is applied in the direction of measuring devices, measuring angles, fine working devices, etc., can solve problems such as the deviation of verticality of the cutting surface

Pending Publication Date: 2020-02-04
福州天瑞线锯科技有限公司
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  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] For this reason, it is necessary to provide a single crystal silicon rod cutting surface angle detection device and a squarer to solve the problem that in the prior art, the squarer directly perfor...

Method used

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  • Silicon single crystal rod cutting surface angle detection device and squaring machine
  • Silicon single crystal rod cutting surface angle detection device and squaring machine

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Embodiment Construction

[0030] In order to explain in detail the technical content, structural features, achieved goals and effects of the technical solution, the following will be described in detail in conjunction with specific embodiments and accompanying drawings.

[0031] see Figure 1 to Figure 2 , the present invention provides a single crystal silicon rod cutting surface angle detection device 9, which is used to detect whether the cutting surface of the single crystal silicon rod 10 is aligned after the central axis of the single crystal silicon rod 10 is aligned with the clamping mechanism It is in a horizontal state, which provides a criterion for judging whether it is necessary to adjust the angle of the single crystal silicon rod 10 before the next cutting, so as to ensure that after two cuts, the two cut surfaces are in a vertical state to ensure the cutting quality of the single crystal silicon rod 10 .

[0032] In a specific embodiment, the single crystal silicon rod cutting surface a...

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Abstract

The invention discloses a silicon single crystal rod cutting surface angle detection device and a squaring machine. The squaring machine comprises the silicon single crystal rod cutting surface angledetection device, and the silicon single crystal rod cutting surface angle detection device comprises a measuring member, a vertical driving mechanism and a longitudinal driving mechanism; the vertical driving mechanism comprises a servo motor, a vertical screw, a connecting seat and a slide rail; the slide rail is vertically arranged at a clamping seat of a clamping mechanism; the connecting seatis provided with a slide block, the slide block is installed in the slide rail in a vertical slidable manner; the servo motor is arranged at the clamping seat of the clamping mechanism, and an outputshaft of the servo motor is vertically arranged; the vertical screw is coaxially connected with the output shaft of the servo motor, the connecting seat is provided with a vertical threaded hole, andthe vertical screw passes through the threaded hole of the connecting seat in a threaded transmission manner; the longitudinal driving mechanism is used for driving the measuring member to move; andthe measuring member is connected to the longitudinal driving mechanism and vertically protrudes upward relative to the connecting seat. The silicon single crystal rod cutting surface angle detectiondevice disclosed by the invention has the advantages of being able to detect whether a cutting surface of a silicon single crystal rod is horizontal.

Description

technical field [0001] The invention relates to the field of brittle and hard material cutting, in particular to a single crystal silicon rod cutting surface angle detection device and a squarer. Background technique [0002] In an existing monocrystalline silicon ingot squarer, both the tail end clamping mechanism and the front end clamping mechanism for clamping the single crystal silicon ingot are equipped with sensors, the sensors are vertical sensors, and the tail end clamps The mechanism and the front-end clamping mechanism can drive the single crystal silicon rod to rotate along its central axis. After the single crystal silicon rotates one circle, the sensor can scan the shape characteristics of the single crystal silicon rod. The control system can obtain the shape characteristics of the single crystal silicon rod The position of the central axis of the crystal line provides information for the alignment of the crystal line. [0003] After the crystal line of the s...

Claims

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Application Information

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IPC IPC(8): G01B21/22G01B21/20G01C1/00B28D5/04B28D7/04
CPCB28D5/04B28D7/043G01B21/20G01B21/22G01C1/00
Inventor 黄奇勋林孝狮黄田玉李元业林剑煌林光展
Owner 福州天瑞线锯科技有限公司
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