Silicon single crystal rod cutting surface angle detection device and squaring machine

Abstract

The invention discloses a silicon single crystal rod cutting surface angle detection device and a squaring machine. The squaring machine comprises the silicon single crystal rod cutting surface angledetection device, and the silicon single crystal rod cutting surface angle detection device comprises a measuring member, a vertical driving mechanism and a longitudinal driving mechanism; the vertical driving mechanism comprises a servo motor, a vertical screw, a connecting seat and a slide rail; the slide rail is vertically arranged at a clamping seat of a clamping mechanism; the connecting seatis provided with a slide block, the slide block is installed in the slide rail in a vertical slidable manner; the servo motor is arranged at the clamping seat of the clamping mechanism, and an outputshaft of the servo motor is vertically arranged; the vertical screw is coaxially connected with the output shaft of the servo motor, the connecting seat is provided with a vertical threaded hole, andthe vertical screw passes through the threaded hole of the connecting seat in a threaded transmission manner; the longitudinal driving mechanism is used for driving the measuring member to move; andthe measuring member is connected to the longitudinal driving mechanism and vertically protrudes upward relative to the connecting seat. The silicon single crystal rod cutting surface angle detectiondevice disclosed by the invention has the advantages of being able to detect whether a cutting surface of a silicon single crystal rod is horizontal.

Description

technical field [0001] The invention relates to the field of brittle and hard material cutting, in particular to a single crystal silicon rod cutting surface angle detection device and a squarer. Background technique [0002] In an existing monocrystalline silicon ingot squarer, both the tail end clamping mechanism and the front end clamping mechanism for clamping the single crystal silicon ingot are equipped with sensors, the sensors are vertical sensors, and the tail end clamps The mechanism and the front-end clamping mechanism can drive the single crystal silicon rod to rotate along its central axis. After the single crystal silicon rotates one circle, the sensor can scan the shape characteristics of the single crystal silicon rod. The control system can obtain the shape characteristics of the single crystal silicon rod The position of the central axis of the crystal line provides information for the alignment of the crystal line. [0003] After the crystal line of the s...

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Problems solved by technology

[0004] For this reason, it is necessary to provide a single crystal silicon rod cutting surface angle detection device and a squarer to solve the problem that in the prior art, the squarer directly performs the next cut after completing one cut and rotating the single crystal silicon rod, resulting in two The problem of the large deviation of the perpendicularity of the cutting surface of the secondary cutting

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