Method for improving preparation yield of FBAR filter and FBAR filter
A filter and yield technology, applied in electrical components, impedance networks, etc., can solve problems such as the adverse effect of filter structure, and achieve the effect of improving Q value and electromechanical coupling coefficient, not easy to collapse, and reducing insertion loss
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[0034] Below, the present invention will be further described in conjunction with the accompanying drawings and specific implementation methods. It should be noted that, under the premise of not conflicting, the various embodiments described below or the technical features can be combined arbitrarily to form new embodiments. .
[0035] see Figure 2-18 ,in, figure 2 A flow chart of an embodiment of the method for improving the FBAR filter preparation yield of the present invention; image 3It is a schematic diagram of an embodiment of forming a piezoelectric thin film on the first substrate in the method for improving the FBAR filter preparation yield of the present invention; Figure 4 It is a schematic diagram of an embodiment of forming the first electrode on the piezoelectric film in the method for improving the FBAR filter preparation yield of the present invention; Figure 5 It is a schematic diagram of an embodiment of forming the first insulating layer in the metho...
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