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Device and method for plating film on curved surface material

A technology of coating device and curved surface is applied in metal material coating process, sputtering coating, ion implantation coating, etc., to achieve the effect of easy large-area production and simple device structure

Inactive Publication Date: 2019-12-24
JINLING INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The technical problem solved by the present invention is: to propose a solution to the problem that the existing vacuum coating machine cannot solve the uniformity and coating diversity required by curved surface coating products

Method used

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  • Device and method for plating film on curved surface material
  • Device and method for plating film on curved surface material
  • Device and method for plating film on curved surface material

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] The shape of the curved surface to be plated is spherical, and the shape of the film thickness correction plate is as follows: figure 2 shown. First, the trimmed film thickness correction plate 9 is installed directly in front of the fixed frame 6 of the plated sample, and then the sample to be plated is installed horizontally on the fixed frame.

[0029] 1. Start vacuuming with a vacuum pump to 1.0×10 -3 Pa, and then filled with argon to raise the pressure to 0.7Pa.

[0030] 2. Turn on the sputtering power supply and perform pre-sputtering on the target. During the pre-sputtering, the target is away from the surface of the sample. By rotating the controller, the revolving device of the plated sample holder 6 is rotated to the front of the target, and then the revolving rotation is stopped. Start the rotation device of the fixed frame of the sample to be plated, so that the sample to be plated has been rotating directly in front of the target.

[0031] 3. Set the p...

Embodiment 2

[0036] The shape of the surface to be plated is a double sphere, and the shape of the film thickness correction plate is as follows: image 3 shown. The shape of the curved surface to be plated is spherical, and the shape of the film thickness correction plate is as follows: figure 2 shown. First, the trimmed film thickness correction plate 9 is installed directly in front of the fixed frame 6 of the plated sample, and then the sample to be plated is installed horizontally on the fixed frame.

[0037] 1. Start vacuuming with a vacuum pump to 1.0×10 -3 Pa, and then filled with argon to raise the pressure to 0.3Pa.

[0038] 2. Turn on the sputtering power supply and perform pre-sputtering on the target. During the pre-sputtering, the target is away from the surface of the sample. By rotating the controller, the revolving device of the plated sample holder 6 is rotated to the front of the target, and then the revolving rotation is stopped. Start the rotation device of the f...

Embodiment 3

[0044] The shape of the curved surface to be plated is a double sphere with a small top and a large bottom, and the shape of the film thickness correction plate is as follows: Figure 4shown. First, the trimmed film thickness correction plate 9 is installed directly in front of the fixed frame 6 of the plated sample, and then the sample to be plated is installed horizontally on the fixed frame.

[0045] 1. Start vacuuming with a vacuum pump to 1.0×10 -3 Pa, and then filled with argon to raise the pressure to 0.5Pa.

[0046] 2. Turn on the sputtering power supply and perform pre-sputtering on the target. During the pre-sputtering, the target is away from the surface of the sample. By rotating the controller, the revolving device of the plated sample holder 6 is rotated to the front of the target, and then the revolving rotation is stopped. Start the rotation device of the fixed frame of the sample to be plated, so that the sample to be plated has been rotating directly in fr...

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Abstract

The invention relates to a technology for plating a film on a curved surface material, in particular to a method for plating the film on the surface of the curved surface material by utilizing vacuumfilm plating equipment. According to the method for plating the film on the surface of the curved surface material by utilizing the vacuum film plating equipment, firstly, a plated sample is installedto a plated sample fixing rack, then vacuumizing is started, after vacuum is reached, a reactive inert gas is filled into a vacuum chamber, a target material is pre-sputtered, after pre-sputtering isfinished, the plated sample fixing rack fixed on a revolution turntable device is made to stop rotating after rotating to right ahead a target, then the plated sample fixing rack is made to start performing self-rotation, and then formal sputtering is started to start film plating. By means of the film plating device and method, an uniform thin film can be plated on a curved surface base material, multiple layers of thin films can be plated on the curved surface according to requirements, the film plating device is simple in structure, and large-scale production is easily realized.

Description

technical field [0001] The invention relates to a technology for coating a curved surface material, in particular to a method for coating the surface of a curved surface material with vacuum coating equipment. Background technique [0002] For a long time, due to the continuous improvement of the national economy and the improvement of people's living standards, the status and role of the coating industry in the national economy has become more and more important. Vacuum coating coatings are widely used in aerospace, automobiles, machine tools, chemical machinery, shipbuilding, Power equipment, hardware tools, medical equipment, standard parts manufacturing and other fields. There are more and more requirements for product coating, the market demand is increasing, the types of coating equipment are becoming more and more complex, and the shapes of products that need coating are also different. Vacuum coating is mainly for planar products, and it is difficult to achieve unif...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/50C23C14/04
CPCC23C14/044C23C14/35C23C14/352C23C14/505
Inventor 张冷
Owner JINLING INST OF TECH
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