Information synchronization system and method for upper and lower computer for semiconductor equipment

Abstract

The invention discloses an upper and lower computer information synchronization system used for semiconductor equipment. The system includes an upper computer, a lower computer and a system database, and the system database is respectively connected to the upper computer and the lower computer through communication. The upper computer and the lower computer are used to record the hardware information of the semiconductor equipment and the event process information in the process of process execution, and the upper computer and the lower computer realize information synchronization based on the data mirroring mechanism, and the synchronized information Feedback to the system database. The invention realizes the flexible selection processing mode and the synchronous management mechanism of hardware information in the case of software abnormality, improves the abnormal processing ability in the technological process, and helps to improve the authenticity and reliability of hardware information.

Description

technical field [0001] The invention relates to the field of semiconductor integrated circuit manufacturing, in particular to an information synchronization system and method for upper and lower computers used in semiconductor equipment. Background technique [0002] The process carried out in semiconductor equipment usually uses silicon wafers as the product carrier, and a series of process processing is performed on the silicon wafers to form process semi-finished products or finished products. Usually, silicon wafer processing is carried in and out of the equipment through industrial manipulators. Due to different equipment, the wafers processed at one time and the Foup (Front opening unified pod, front opening standard box) loaded with wafers are also different. . For example, a vertical oxidation furnace can process 1-141 wafers at a time, such as figure 1 As shown, among them, represents the wafer, Indicates a slot. When the equipment is in the process, if there...

AI Technical Summary

Problems solved by technology

[0011] 1) The authenticity and validity of the system data information cannot be guaranteed;

[0012] 2) The data information source for information synchronization is single, and comparison cannot be realized;

[0013] 3) Information synchronization is only based on the upper computer or the lower computer, and the user cannot follow the actual situation

[0015] 4) The user cannot arbitrarily change the relevant information parameters of the upper and lower computer wafers, Foup and manipulators;

[0016] 5) The system data only relies on the logical process to record the hardware transmission process and final position, and cannot be recorded

Images