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A management method and system for a wafer monitoring chip

A management method and management system technology, applied in the field of wafer monitoring chip management, can solve problems such as inappropriate, low efficiency, and error-prone management, and achieve the effects of avoiding human errors, improving efficiency, and facilitating management and distribution

Active Publication Date: 2021-04-09
福建省福联集成电路有限公司
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  • Abstract
  • Description
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AI Technical Summary

Problems solved by technology

[0003] For this reason, it is necessary to provide a management method for wafer monitoring sheets, in order to solve the problems of low efficiency and error-prone and improper management of manual management of wafer monitoring sheets in the prior art.

Method used

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  • A management method and system for a wafer monitoring chip
  • A management method and system for a wafer monitoring chip
  • A management method and system for a wafer monitoring chip

Examples

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specific Embodiment approach

[0067] see Figure 9 , in this embodiment, a specific implementation of a management system 900 for a wafer monitoring sheet is as follows:

[0068] A management system 900 for wafer monitoring sheets, comprising: a transfer track 901, a transfer arm 902, a detection module 903, an engraving module 904, a qualified sheet storage bin 905, and a scrap sheet storage bin 906; the transfer arm 902 is arranged on the transfer On the track 901, the transfer arm 902 is used to: transfer the wafer monitoring sheet to different regional positions; the detection module 903 is used to: detect whether the wafer monitoring sheet is qualified according to preset rules; the engraving module 904 is used to : if the wafer monitoring sheet is qualified, the wafer monitoring sheet is engraved; the qualified sheet storage bin 905 is used for: storing qualified wafer monitoring sheet; the scrap sheet storage bin 906 is used for: storing Unqualified wafer monitor.

[0069] By setting preset rules,...

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Abstract

The invention relates to the technical field of monitoring chip management, in particular to a method and system for managing a wafer monitoring chip. The management method of the wafer monitor sheet includes the steps of: detecting whether the wafer monitor sheet is qualified according to preset rules, and if the wafer monitor sheet is qualified, engraving the wafer monitor sheet and storing it to the qualified chip storage bin; if the wafer monitoring chip is unqualified, store it in the scrap chip storage bin. The whole process is an automated program flow without any manual participation, which not only greatly improves the efficiency, but also avoids human errors that may exist in the manual inspection process.

Description

technical field [0001] The invention relates to the technical field of monitoring chip management, in particular to a method and system for managing a wafer monitoring chip. Background technique [0002] The wafer monitoring chip is a method to replace the product to realize the data measurement and monitoring of a certain process. In the existing technology, the existing management methods of monitoring films are mostly manual operation, naked eye recognition, manual statistics and control. Risks such as circular scrapping. Contents of the invention [0003] Therefore, it is necessary to provide a method for managing wafer monitors to solve the problems in the prior art that manual management of wafer monitors is inefficient and prone to errors and improper management. The specific technical scheme is as follows: [0004] A method for managing a wafer monitoring sheet, comprising the steps of: checking whether the wafer monitoring sheet is qualified according to preset...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67H01L21/66
CPCH01L21/67265H01L21/67276H01L22/26
Inventor 林锦伟林伟铭钟艾东甘凯杰翁佩雪邓丹丹赵玉会郭文海
Owner 福建省福联集成电路有限公司
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