Micro driver based on surface plasmon polariton waveguide structure

Abstract

The invention relates to a micro driver based on a surface plasmon polariton waveguide structure. The micro driver structurally comprises two parts, namely a surface plasmon polariton waveguide layerand a driving arm layer. The surface plasmon polariton waveguide layer contains a surface plasmon polariton waveguide structure and a photo-thermal conversion region, and two or more layers of the surface plasmon polariton waveguide layer and the driving arm layer are combined in a laminated manner. According to the micro driver based on the surface plasmon polariton waveguide structure, the surface plasmon polariton waveguide structure is used for controlling the transmission mode of the incident photoelectric signal, accurate control over the photoelectric signal can be realized through thedesign of the surface plasmon polariton waveguide structure, the energy size and mode distribution or field distribution of the optical signal transmitted to the photo-thermal conversion area can be accurately controlled, and accurate control of different actions of the driving arm is realized.

Description

technical field [0001] The invention relates to a micro-driver, in particular to a micro-driver based on a surface plasmon waveguide structure. Background technique [0002] With the continuous exploration and research of human beings into the micro world, Micro optical electromechanical system (MOEMS), as an important branch field of micro and nano technology, has attracted the attention and attention of researchers all over the world. In micro actuators, micro sensors , micro power system and other fields have been widely used. Among them, the micro-driver, as an important actuator and power source of the micro-opto-electromechanical system, is one of the key technologies in this field. In recent years, micro-drives including micro-motors, micro-valves, micro-gears, micro-pumps, and micro-mechanical switches have been continuously realized, so that sensors, drives, and calculators of conventional size can be integrated in centimeter- and millimeter-scale systems. , makin...

AI Technical Summary

Problems solved by technology

These driving mechanisms are mostly controlled by electrical signals. Although the main body size can be made very small, most of them need to be connected to the external control system through wires, or need a built-in battery as a power source. The overall structure is difficult to miniaturize and lacks independence. , restricting their scope of application

[0003] Existing photothermal drive technologies mostly rely on the spot formed by the laser beam itself on the expansion arm as a heat source, and the entire expansion arm is heated unevenly, which limits the efficiency of photothermal drive; Multiple laser beams are required, which increases the complexity of the control system and is not conducive to the miniaturization of the entire system; in addition, in order to obtain a larger photothermal deflection driving amount, it is necessary to increase the laser power, which can easily lead to local temperature rise of the driving arm Excessively high, causing failure and damage to the micro-driver

These problems have restricted the further development of photothermal drive to a certain extent.

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