Semiconductor device and method of forming the same
A semiconductor and device technology, applied in the field of semiconductor devices and their formation, can solve problems such as poor performance of semiconductor devices, achieve the effects of improving performance, avoiding impact, and reducing etching damage
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[0030] As mentioned in the background, semiconductor devices formed in the prior art have poor performance.
[0031] Figure 1 to Figure 4 It is a structural schematic diagram of the formation process of a semiconductor device.
[0032] refer to figure 1 , providing a semiconductor substrate 100 with a plurality of fins 110 on the semiconductor substrate 100; forming a dielectric layer 120 on the semiconductor substrate 100 and the fins 110; groove 121, the groove 121 includes a first groove region 1211 exposing part of the fin 110 and a second groove region 1212 exposing part of the fin 110, from the center of the first groove region 1211 to the center of the second groove region 1212 The direction is perpendicular to the extending direction of the fin portion 110 .
[0033] refer to figure 2 , form a gate dielectric layer (not shown) on the sidewalls and bottoms of the first groove region 1211 and the second groove region 1212 of the trench 121, a bottom work function l...
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