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Combined sem-cl and fib-ioe microscopy

A technique of microscopy and samples, applied in the field of microscope systems, can solve problems such as lack of spatial resolution and elemental analysis capabilities

Pending Publication Date: 2019-07-05
FEI CO
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, SEM-CL is limited by its spatial resolution and lack of elemental analysis capabilities

Method used

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  • Combined sem-cl and fib-ioe microscopy
  • Combined sem-cl and fib-ioe microscopy
  • Combined sem-cl and fib-ioe microscopy

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Embodiment Construction

[0019] I. general considerations

[0020] Disclosed herein are representative embodiments of methods, devices, and systems for microscopy using both scanning electron microscopy-cathodoluminescence (SEM-CL) microscopy and focused ion beam-ion-induced optical emission (FIB-IOE) microscopy. The disclosed methods, devices and systems should not be construed as limiting in any way. On the contrary, the present disclosure relates to all novel and non-obvious features and aspects of the various disclosed embodiments, used alone or in various combinations and sub-combinations with each other. Furthermore, any features or aspects of the disclosed embodiments can be used in various combinations and sub-combinations with each other. For example, one or more method acts or features from one embodiment can be used with one or more method acts or features from another embodiment, and vice versa. The disclosed methods, apparatus and systems are not limited to any particular aspect or fe...

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Abstract

The present invention provides example embodiments for performing microscopy using microscope systems that combine both scanning-electron-microscope-cathodoluminescence (SEM-CL) microscopy and focused-ion-beam ion-induced optical emission (FIB-IOE) microscopy. Certain embodiments comprise operating a microscopy system in a first microscopy mode in which an electron beam interacts with a sample ata sample location and causes first-mode photons and electrons to be emitted, the first-mode photons including photons generated through a cathodoluminescence process; and operating a microscopy systemin a second microscopy mode in which an ion beam interacts with a sample at the sample location and causes second-mode photons to be emitted, the second-mode photons including photons generated through an ion-induced luminescence process and photons generated through an atomic de-excitation process.

Description

[0001] Cross References to Related Applications [0002] This application claims U.S. Provisional Application No. 62 / 610,886, entitled "COMBINED SEM-CL AND FIB-IOE MICROSCOPY," filed December 27, 2017, and filed at Submitted on December 27, 2017 titled "METHOD AND APPARATUS FOR ENHANCING SE DETECTION IN MIRROR-BASEDLIGHT IMAGING CHARGED PARTICLE MICROSCOPES" The benefit of U.S. Provisional Application No. 62 / 610,822, both of which are incorporated herein by reference in their entirety. technical field [0003] The present application relates to microscope systems for compound scanning electron microscopy-cathodoluminescence (SEM-CL) microscopy and focused ion beam-ion-induced optical emission (FIB-IOE) microscopy. Background technique [0004] Scanning electron microscopy-cathodoluminescence (SEM-CL) microscopy is a technique that provides information about trace elements and information about mechanically induced defects in solids. Among other things, SEM-CL can be used ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/26H01J37/22
CPCH01J37/268H01J37/26H01J37/22H01J37/28H01J37/292G01N23/2254G01N21/65H01J2237/31749
Inventor M.马祖兹G.格莱德修G.布德尼克J.菲勒维茨
Owner FEI CO
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