Cassette Rotation Mechanism and Loading Chamber

Abstract

The invention discloses a film box rotating mechanism and a loading chamber. The film cassette rotating mechanism includes a supporting base, a rotating supporting base and a moving assembly; the supporting base can move linearly in the vertical direction under the action of the driving force, the rotating supporting base is located on the supporting base, and one end of the rotating supporting base is connected with the supporting base. One end is rotatably connected, and the rotating support base is used to load the film cassette; the moving assembly includes a guide rail, a moving part and an elastic part, the moving part is connected to the side of the rotating supporting base, and the guide rail is used to be fixedly arranged on the side wall of the loading chamber; During the downward movement of the support base, the guide rail can contact the moving part to prevent the moving part from moving downward, so that the rotating support base can be rotated from the vertical position to the flat position; Restoration force for swiveling from the flat position to the upright position. It can make the wafer have an accurate pick-up position in the cassette, improve the pick-up yield rate, and save the pick-up time.

Description

technical field [0001] The invention relates to the technical field of semiconductor equipment, in particular to a chip box rotating mechanism and a loading chamber comprising the chip box rotating mechanism. Background technique [0002] In the traditional semiconductor equipment transmission system, such as figure 1 As shown, the transmission system includes a loading chamber 200 , a transmission chamber 300 and a process chamber 400 , wherein a cassette 210 and a lifting assembly 220 are disposed in the loading chamber 200 , and a manipulator 310 is disposed in the transmission chamber 300 . Specifically, the lifting assembly 220 drives the cassette 210 to move linearly along the vertical direction, so as to facilitate the manipulator 310 in the transfer chamber 300 to take out wafers from the cassette 210 . Among them, taking out wafers from the cassette 210 is the first step in the automatic transfer process of many semiconductor devices, so the efficiency and reliabil...

AI Technical Summary

Problems solved by technology

[0009] But in the chip box rotating mechanism of above-mentioned structure, at first, because the kind of wafer is different, coefficient of friction is different, under the situation that inclination angle is not enough when tilting, wafer may not be able to slide to the notch of chip box rear portion, and tilts The angle is limited by the center of gravity of the mechanism and cannot exceed the center of rotation, otherwise the film cassette cannot be returned when it is poured out

Secondly, the entire loading action requires the operator to put the cassette into the chamber, which requires a wide opening of the chamber, and the operation action is not ergonomic, which may easily cause mistakes and cause the wafer to slip out

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