Exploding foil integrated chip based on low-temperature co-fired ceramic and preparation technology thereof
A technology of low-temperature co-fired ceramics and integrated chips, which is applied in blasting barrels, offensive equipment, weapon accessories, etc. It can solve the problems of low energy utilization efficiency of explosive foil detonator units, difficulty in miniaturization, and high ignition energy, and achieve energy utilization. Improve, improve product consistency, high degree of integration effect
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[0047] In this embodiment, an explosive foil detonator is designed on the basis of the explosive foil integrated chip unit. figure 1 , figure 2 , Figure 3, Figure 4 and Figure 5 The explosive foil integrated chip unit includes a ceramic substrate 1, a metal Au layer 2, a Parylene C layer 3-a, a metal W-Ti / Cu layer 3-b, an accelerating chamber 4, a charge tank 5 and an explosive column 6, In addition, it also includes the metal via 7-a, the paste 7-b in the ceramic substrate 1, the pad area 8 on the back and the Pd / Ag layer 9 to facilitate the connection with other parts. The ceramic substrate 1 is used as a backplane in the explosive foil integrated chip, and its length, width, and height are 11mm×7mm×1mm respectively. The metal Au layer 2 is placed on the ceramic substrate 1, and the thickness is 6-10μm. The metal Au layer 2 includes bridges. Area 2-a, transition area 2-b and conduction band 2-c are three parts. Bridge area 2-a is the part with the smallest cross-sectional ar...
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