Vertical composite film system continuous magnetron sputtering production line for automobile glass

Abstract

The invention discloses a vertical composite film system continuous magnetron sputtering production line for automobile glass. The production line comprises a feeding section and a discharging section, the feeding section is sequentially connected with a group of primary vacuum chamber, low vacuum chamber, middle vacuum chamber and high vacuum chamber from front to back; the discharging section issequentially connected with the other group of high vacuum chamber, middle vacuum chamber, low vacuum chamber and primary vacuum chamber from front to back; a sputtering chamber comprises at least one coating subarea, each coating subarea is provided with at least one rotary cathode device, the rotary cathode device is connected with an angle adjusting device, and the angle adjusting device is connected with the anode boxes of the coating subareas through a plurality of connecting arms extending along the longitudinal axis. The vertical composite film system continuous magnetron sputtering production line for automobile glass provided by the invention can realize large-batch and low-cost production of various coating films, is high in sputtering deposition rate and high in process universality, and is particularly suitable for large-scale industrial production.

Description

technical field [0001] The invention relates to a vertical composite film system continuous magnetron sputtering production line for automobile glass, belonging to the technical field of vacuum coating. Background technique [0002] Glass is an important building material. With the continuous improvement of the decorative requirements of buildings, the use of glass in the construction industry is also increasing. However, when people choose glass doors and windows for buildings today, in addition to considering their aesthetic and appearance features, they pay more attention to issues such as thermal control, cooling costs, and the comfort balance of internal sunlight projection. This makes the upstart in the coated glass family - Low-E glass stand out and become the focus of attention. [0003] Low-E glass, also known as low-emissivity glass, is a film system product composed of multiple layers of metal or other compounds coated on the glass surface. Its coating layer has...

AI Technical Summary

Problems solved by technology

Therefore, these production lines cannot meet the requirements for coating LOW-E glass

[0018] With the rapid development of coating technology in the field of vacuum coating, the requirements for coating products are getting higher and higher. Therefore, more and more improvements have occurred in the coating production line, and the requirements of the production line have increased accordingly. The overall stability of the coating production line in the prior art Sexuality and coating uniformity, low production efficiency and high equipment cost

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