High-current MOS transistor with stable operation
A MOS tube, stable operation technology, applied in the field of MOS tubes, can solve problems such as unstable operation, achieve stable operation, simple preparation, and shorten time-consuming effects
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[0048] A high-current MOS tube with stable operation, the preparation process is as follows:
[0049] Step 1: double well implantation to generate n well and p well on the silicon wafer; steps of n well formation: epitaxial growth, original oxide growth, first layer mask, n well implantation, n well implantation (high energy), annealing; p Steps of well formation: second layer mask, p-well implantation, p-well implantation (high energy), annealing;
[0050] Step 2: shallow trench isolation is used to isolate the silicon active area; the steps of shallow trench isolation: trench etching, oxide filling and oxide planarization; in which the trench is etched, and a layer of oxide layer with a thickness of about 150 angstroms is grown on the silicon surface; It can be used as an isolation layer to protect the active area from chemical contamination during the process of removing the nitride. A thin layer of silicon nitride is grown on the silicon surface. Since silicon nitride is a...
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