Tool film plating rotating frame device of high-vacuum multi-arc ion film plating machine

Abstract

The invention discloses a tool film plating rotating frame device of a high-vacuum multi-arc ion film plating machine. The tool film plating rotating frame device comprises a lower rotating table andan upper rotating table, wherein the lower rotating table and the upper rotating table are oppositely arranged in the up-and-down direction. A circle of U-shaped through holes which are arranged in acentral symmetry mode are arranged on the edge of the lower rotating table. Lower bearings are arranged in the perpendicular directions of the U-shaped through holes, lower transmission shafts are connected to the lower bearings, and a small gear is embedded into the lower end of each lower transmission shaft and meshes with a large gear which is located in the center of the bottom of the lower rotating table. Upper transmission shafts which are arranged on workpiece rotating tables in an embedded mode are connected to the lower transmission shafts, workpiece bases are arranged on the workpiece rotating tables, and multiple autorotation gears which are uniformly distributed are arranged at the bottoms of the workpiece bases. A circle of supporting columns which are uniformly distributed are fixed between the upper rotating table and the lower rotating table, and the supporting columns are located on the inner sides of the lower transmission shafts or the upper transmission shafts. A poking rod frame is further arranged on each supporting column, and one end of each poking rod frame makes contact with the corresponding autorotation gears. The tool film plating rotating frame devicesuccessfully solves the technical problems that a conventional revolution and autorotation device is complex in structure, and the rotating speed of a rotating frame is unstable at the high temperature.

Description

technical field [0001] The invention belongs to the technical field of high vacuum arc ion plating devices, and relates to a tool coating turntable device of a high vacuum multi-arc ion coating machine. Background technique [0002] The tool coating turret device of the high vacuum multi-arc ion coating machine is a kind of kinematic mechanism used to clamp the tool. The kinematic mechanism is driven by a frequency conversion motor to realize the revolution and rotation of the workpiece. The movement mode of the movement mechanism is usually double and triple movement. It is used for the movement mechanism of the high vacuum coating machine. It is mainly composed of power transmission gear, upper gear, lower gear support, lower gear and lower gear support. The movement The mechanism mainly realizes the stable revolution and rotation of the workpiece through the meshing of the gears. During coating, the rotation of the upper gear through the rotation of the frequency conversi...

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Problems solved by technology

[0004] The purpose of the present invention is to provide a tool coating turret device of a high vacuum multi-arc ion coating machine, to solve the problems of gear stuck and inconsistent coating time in the prior art

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