Rotary shaft of rotary workpiece with voltage and temperature measuring signal being conducted in co-shaft mode and installation method

Abstract

The invention provides a rotary shaft of a rotary workpiece with voltage and temperature measuring signal being conducted in a co-shaft mode and an installation method. The rotary shaft of the rotaryworkpiece with voltage and temperature measuring signal being conducted in the co-shaft mode comprises a hollow shaft, an insulating sleeve, a thermocouple conducting wire, a connector, an insulatingflange A, an outer connector, a thermocouple, a workpiece desk end connector, an insulating flange B, a chamber penetration mechanism, a thermocouple upper end connecter, a driving wheel and an electric brush sliding ring; the insulation sleeve is arranged in the hollow shaft, the thermocouple conducting wire penetrates through the insulation sleeve, the thermocouple upper end connecter is connected to one end of the thermocouple conducting wire, and the connector is connected to the other end of the thermocouple conducting wire; the thermocouple upper end connecter is connected with the workpiece desk end connector, the workpiece desk end connector is connected with the thermocouple through a conducting wire, and the connector is connected with the outer connector through the flange A; and the hollow shaft penetrates through the insulating flange B, the chamber penetration mechanism, the driving wheel and the electric brush sliding ring. The rotary shaft is capable of realizing the co-shaft conduction of the voltage and the temperature measuring signal, and meanwhile, the problems of the mutual interruption between bias voltage and temperature measurement and the vulnerability ofdividedly transmitted thermocouples are solved.

Description

technical field [0001] The invention relates to a rotating shaft and an installation method of a rotating workpiece with coaxial conduction of voltage and temperature measuring signals, which are suitable for surface treatment of physical vapor deposition and chemical vapor deposition. Background technique [0002] Surface treatment methods such as physical vapor deposition and chemical vapor deposition are important methods to modify the surface of workpieces and improve the performance of parts. However, as the shape of mechanical parts becomes more and more complex, the requirements for surface performance become higher and higher. The requirements are complex, which is reflected in the need to rotate the workpiece table to ensure uniform coating, and at the same time, it is necessary to apply a bias voltage to the surface of the component and perform accurate temperature measurement. [0003] Chinese Patent Publication No. CN2874445Y, date of publication is February 28, ...

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Problems solved by technology

[0003] Chinese Patent Publication No. CN2874445Y, date of publication is February 28, 2007, titled "Real-time Temperature Measuring Device for Rotating Workpiece and Vacuum Coating System Using the Device", discloses a real-time temperature measuring device for rotating workpiece, the system The temperature measurement signal is transmitted to the rotating turret through the hollow shaft. Although it has the characteristics of real-time temperature measurement, its disadvantage is that the probe cannot avoid the interference of the voltage signal. The voltage is between -1500V and 1000V. Such a high voltage will affect the signal transmission of the temperature sensor, causing distortion of the temperature measurement signal and even damage to the temperature measurement system.

[0004] Chinese Patent Publication No. CN204589290U, the publication date is August 26, 2015, and the name is "a bias auxiliary device for arc ion vacuum coating machine", which discloses a bias auxiliary device for arc ion vacuum coating machine, including a vacuum chamber and The workpiece turret can be biased, but its workpiece turret is fixed inside the vacuum chamber and cannot rotate, and the temperature measurement has not been solved.

[0005] Chinese Patent Publication No. CN202482417U, the date of publication is October 10, 2012, and the title is "Rotary Bias Applying Device", which discloses a rotating biasing device, which can apply a bias on the workpiece turret, but itself Simultaneous temperature transmission not possible

[0006] Chinese Patent Publication No. CN205785568U, published on December 7, 2016, is a temperature measurement system for vacuum heat treatment equipment, which introduces thermocouples from the top of the vacuum chamber into the workpiece turret through a rotating device, and insulates the thermocouples , and apply bias voltage at the same time. The disadvantage of this setting is that the workpiece table cannot be taken out of the cavity, and the strength of the thermocouple itself is low, and the rotational torque is relatively large under long-term high temperature, which is easy to cause damage

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