A 2.5 D interdigital electrode manufacturing method and an interdigital electrode

Abstract

The embodiment of the invention provides a 2.5 D interdigital electrode manufacturing method and an interdigital electrode. The method comprises the following steps: exposing and developing photoresist spin-coated on a seed layer on a silicon wafer with an electron beam evaporation Cr / Au seed layer to form a required electrode pattern, then carrying out pulse electroplating in a gold electroplating solution, and controlling the electrode thickness by adjusting the electroplating time according to requirements. The method aims to increase the electrode thickness, further fix an object to be detected between electrodes, enable an electric field to completely cover the object to be detected, enable a test electric field between the electrodes to change from an arc electric field formed by anedge effect into a parallel electric field, enable a detection signal to be more stable, and finally improve the detection limit of the detection electrode. And on the other hand, as the thickness ofthe electrode is increased, the side wall of the electrode can serve as a microfluidic channel to be combined with a microfluidic system to complete detection automation.

Description

technical field [0001] Embodiments of the present invention relate to the technical field of chemical sensing, and more specifically, relate to a method for manufacturing 2.5D interdigitated electrodes and the interdigitated electrodes. Background technique [0002] As an electrochemical sensing device, planar electrodes have attracted extensive attention due to their high sensitivity and ease of miniaturization. Moreover, the electrochemical response enables real-time detection. The interdigitated electrode refers to an electrode with a periodic pattern in a finger-like or combed plane. As one of the most widely used planar electrodes, it has excellent characteristics of planar electrode sensing. It is used in non-destructive testing, electronic communications, and chemical testing. and other widely used. [0003] With the improvement of health concepts, people pay more and more attention to food safety, environmental issues and the development of medicine. At present, c...

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Problems solved by technology

Moreover, when such a structure is combined with a microfluidic system to complete automatic detection and realize real-time monitoring, there is also the problem that the solution can only be measured by titration but not by flow.

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