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Ceiling transfer system and ceiling transfer car

A technology for handling systems and moving vehicles, which is applied in the field of ceiling handling systems and ceiling moving vehicles, and can solve problems such as difficulty in increasing the number of items and limited number of loading parts

Pending Publication Date: 2019-05-21
MURATA MASCH LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Even if the bottom and bottom and side loading parts of these guide rails are combined, the number of loading parts is limited, and it is difficult to increase the number of articles that can be stored.

Method used

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  • Ceiling transfer system and ceiling transfer car
  • Ceiling transfer system and ceiling transfer car
  • Ceiling transfer system and ceiling transfer car

Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach

[0025] figure 1 as well as figure 2 It is a figure which shows an example of the ceiling conveyance system 100 which concerns on 1st Embodiment. figure 1 is the main view, figure 2 is a side view. The ceiling transport system 100 includes a ceiling transport vehicle 3 , a first loading unit 21 , a second loading unit 22 , and a third loading unit 23 . The ceiling conveyance system 100 is installed in, for example, a semiconductor device manufacturing factory. The ceiling transport system 100 can hold and transport the article 2 by the ceiling transport vehicle 3 , and can also place the article 2 on the first loading unit 21 , the second loading unit 22 , and the third loading unit 23 by using the ceiling transport vehicle 3 . , and keep item 2. In addition, in the present embodiment, whether or not to provide the third mounting portion 23 is optional, so figure 1 is represented by a single dotted line.

[0026] The article 2 is, for example, a transport container for...

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Abstract

To increase the number of articles that can be stored near the ceiling by increasing mounting units on which articles can be mounted laterally of a track. A ceiling transfer system (100) is provided with: a ceiling transfer car (3); a first mounting unit (21) which is disposed under and laterally of a travel rail (6), on which an article being held by an article holding unit can be mounted in a state in which the article is displaced by a lateral displacement mechanism (11) beyond the article holding unit (13) and a lifting / lowering drive unit (12) by a first projection amount (R1), and whichis set to a height such that the article can be displaced by the lateral displacement mechanism beyond the article holding unit and the lifting / lowering drive unit by a second projection amount (R2) while the article is mounted on the first mounting unit and is being held by the article holding unit; and a second mounting unit (22) which is disposed under and laterally of the travel rail and outside the first mounting unit, and on which the article being held by the article holding unit can be mounted in a state of being displaced by the lateral displacement mechanism beyond the article holding unit and the lifting / lowering drive unit by the second projection amount.

Description

technical field [0001] The invention relates to a ceiling transport system and a ceiling transport vehicle. Background technique [0002] In manufacturing plants such as semiconductor manufacturing plants, to transport items such as semiconductor wafer transport containers (FOUP) and mask transport mask boxes (Reticle Pod), etc., a ceiling transport vehicle that travels along the guide rails laid on the ceiling is used . In addition, in such manufacturing plants, storage devices for temporarily storing articles are often installed on the floor, and therefore the space on the floor is occupied as much as the storage device. Therefore, in recent years, a ceiling conveyance system has been proposed in which a loading unit on which articles can be placed is arranged along a travel path of a ceiling conveyance vehicle, and articles are stored near the ceiling (for example, refer to Patent Document 1). [0003] Patent Document 1: Japanese Patent No. 5729415 [0004] In the ceil...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/677B65G49/07
CPCH01L21/67733H01L21/67769H01L21/67736B61B3/00B65G37/02B66C1/28
Inventor 今堀冬树
Owner MURATA MASCH LTD
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