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Preparation method of three-dimensional large-scale high-precision microfluidic channel

A microfluidic channel, high-precision technology, used in chemical instruments and methods, laboratory containers, laboratory utensils, etc. Test and other problems, to achieve the effect of stable and controllable closing ability, no cracks, and stable processing window

Active Publication Date: 2021-06-25
EAST CHINA NORMAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, the stability and safety of microfluidic operations are limited to a certain extent by the thickness of the PDMS film and the strength of the seal between it and the transparent material.
This method can be well applied to microfluidic research at the general laboratory level, but for commercial and industrial microfluidic applications, especially for some time-consuming and harsh continuous-flow microscale organic chemical reactions, the auxiliary channel The chemical stability and mechanical properties of the PDMS material in the closed area will be greatly tested, which will cause great challenges to the sealing and safety of the above method

Method used

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  • Preparation method of three-dimensional large-scale high-precision microfluidic channel
  • Preparation method of three-dimensional large-scale high-precision microfluidic channel
  • Preparation method of three-dimensional large-scale high-precision microfluidic channel

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Effect test

Embodiment 1

[0029] Step 1: Ultrashort Pulse Laser Irradiation

[0030] Such as figure 1 As shown, a clean quartz glass sample with dimensions of 100 mm × 5 mm × 2 mm and polished six sides was taken and fixed on a three-dimensional translation stage; the center wavelength of the laser was 1026 nm, the repetition frequency was 250 kHz, and the pulse width was 270 fs ; Use a microscope objective lens with a numerical aperture of 0.25 to focus the laser to directly write the modified pattern. Using linearly polarized light processing, the polarization direction is perpendicular to the direct writing direction. The length of the direct-written three-dimensional U-shaped microchannel pattern is ~80 mm, and it is located 300 μm below the surface of the quartz glass. The lengths of multiple auxiliary channel patterns connecting the sample surface and the microchannel are all 300 μm, and the spacing between the auxiliary channels is 1 mm. The average power of laser irradiation was 800 mW, and t...

Embodiment 2

[0036] Step 1: Ultrashort Pulse Laser Irradiation

[0037] A clean quartz glass sample with a size of 20 mm×10 mm×2 mm and polished six sides was taken and fixed on a three-dimensional translation stage; the center wavelength of the laser was 1026 nm, the repetition frequency was 250 kHz, and the pulse width was 270 fs; A microscopic objective lens with an aperture of 0.25 focuses the laser light, and a quarter-wave plate is placed in front of the focusing objective lens to generate circularly polarized light, and then write three-dimensional modified patterns directly. The lateral length of the direct-written spiral channel pattern is ~10 mm, the pattern edge is located 200 μm below the surface of the quartz glass, the spiral diameter is 300 μm, and the pitch is 500 μm. The single length of the direct-written auxiliary channel connecting the sample surface and the helical microchannel is 200 μm, and the distance between two adjacent channels is 500 μm. The average power of l...

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Abstract

The invention discloses a method for preparing a three-dimensional large-scale high-precision microfluidic channel. First, an ultrashort pulse laser is used to directly write and irradiate the interior of a transparent material to produce a high-precision three-dimensional microchannel pattern and to connect the sample surface and the internal microchannel. Several auxiliary channel patterns, and then selectively remove the above patterns by wet chemical etching to obtain a composite through-through structure composed of hollow and connected three-dimensional microchannels and auxiliary channels with unlimited three-dimensional size and shape. The surface opening of the auxiliary channel is melted and closed to realize the controllable preparation of three-dimensional large-scale and high-precision three-dimensional microfluidic channels. The invention can improve the efficiency, quality and overall size of three-dimensional microchannel preparation by using carbon dioxide laser melting and sealing auxiliary channels, and is suitable for high-performance manufacturing and integration of commercial and industrial three-dimensional microfluidic systems.

Description

technical field [0001] The invention relates to a method for manufacturing a three-dimensional microchannel and a microfluidic device, in particular to a method for preparing a three-dimensional large-scale and high-precision microfluidic channel by using an ultrashort pulse laser. The invention is applicable to the fields of commercial and industrial microfluidic devices and applications. Background technique [0002] Microfluidic technology can realize rapid, precise and controllable operation and processing of micro-scale fluids, and has significant advantages such as high throughput, high efficiency, high sensitivity and low energy consumption. It has been widely used in chemical engineering, biopharmaceuticals, medical diagnosis, Fields such as photonics show important application prospects. Microchannel is the core unit of microfluidic chip, and its high-performance and multifunctional preparation technology is of great significance for improving the development of mi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B01L3/00
Inventor 程亚徐剑林子杰李晓龙方致伟
Owner EAST CHINA NORMAL UNIV
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