Hemispherical Harmonic Oscillator Modification System and Modification Method Based on Chemical Vapor

Abstract

The invention discloses a hemispherical resonator modifying system and method based on chemical vapor and belongs to the technical field of vibratory gyroscopes. The invention involves a hemisphericalresonator chemical vapor modifying system and a hemispherical resonator chemical vapor modifying method. The system herein comprises a vapor generator and a resonator reactor. Based on the system designed herein, the method herein includes the steps of, such as, determining spindle direction and frequency cracking of a resonator, determining slope between removed mass and frequency cracking, calibrating the slope to determine modifying time, and treating four regions to be modified; modification of the frequency cracking of the hemispherical resonator is achieved through the steps, the problem is solved that zero offset drift of the hemispherical resonator gyroscope is caused by frequency cracking. The system and method herein have the advantages of zero reduction in hemispherical resonator quality factor, modification region controllability, high modification efficiency, good system simplicity, low cost and the like, and are widely applicable to the inertial navigation fields, such as aerospace and sailing.

Description

technical field [0001] The invention belongs to the technical field of vibrating gyroscopes, and in particular relates to a chemical vapor-based hemispherical harmonic oscillator shape modification system and a shape modification method. Background technique [0002] Hemispherical Resonator Gyroscope (HRG) is a new type of Coriolis Vibratory Gyroscope (Coriolis Vibratory Gyroscopes), which uses the Coriolis Effect to measure the rotation angle and angular velocity. Shock resistance, simple structure, no maintenance and other characteristics, it has been widely used in aerospace, aviation, navigation and other fields in recent years. [0003] The classic structure of the hemispherical resonant gyroscope includes excitation electrodes, fused silica hemispherical resonators, and sensitive readout electrodes. The fused silica hemispherical resonator is the core sensitive element of the hemispherical resonant gyroscope, and its accuracy has an important impact on the performance ...

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Problems solved by technology

Their research shows that both mechanical trimming and laser trimming will inevitably lead to deterioration of the relevant acoustic parameters, and the method of ion beam modification can remove excess mass from the surface of the spherical shell while bringing the smallest harmonic to the harmonic oscillator. [Comparative literature 7: Bodunov B P, Lopatin V M, Lunin BS, Lynch D D, Voros AR. Low-cost hemispherical resonator for use in smallcommercial HRG-based navigation systems[C] / / The 4th Saint Petersburg International Conference on Integrated Navigation Systems, Saint Petersburg, Russia, 1997: 41~47.]; Hu Xiaodong and others reduced the frequency cracking of the hemispherical harmonic oscillator through ion beam modification. This method requires expensive equipment, complicated process, and low modification efficiency[ Reference 8: Hu Xiaodong; Luo Kangjun; Yu Bo. Mass leveling of hemispherical oscillators using ion beam technology [C]. Proceedings of the Fifth Academic Annual Conference of the Chinese Society of Inertial Technology, Guilin, China, 2002, 247-252.] ;

[0009] Chemical solution modification: Basarab proposed chemical solution modification, and they gave the theoretical analysis and steps of chemical solution modification [Comparison Document 9: Basarab M A, Lunin B S, Matveev V A, Humankin EA. Balancing of hemispherical resonator gyros by chemical etching[J].Gyroscopy and Navigation,2015,6(3):218~223.], studies have shown that chemical modification is highly efficient, but the accuracy currently achievable is not high, and it is inconvenient for mass production and promotion [Comparative Literature 10: Wang, Y.; Pan, Y.; Qu, T.; Jia, Y.; Yang, K.; Luo, H. Decreasing Frequency Splits of Hemispherical Resonators by Chemical Etching[J].Sensors 2018,18,3772.]

[0010] Several current modification methods have some disadvantages: mechanical trimming and laser ablation will reduce the quality factor of the harmonic oscillator, the modification efficiency of ion beam modification is low, and the accuracy of current chemical solution modification is not high

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