Tunable resonant cavity based on flexible surface plasmon coupler and its preparation method

Abstract

The invention discloses an adjustable resonant cavity based on a flexible surface plasmon coupler, and a preparation method thereof. The adjustable resonant cavity comprises a tunable flexible surfaceplasmon coupler formed by an upper branch flexible waveguide and a lower branch flexible waveguide, a flexible surface plasmon directional coupler, a first flexible plasmon waveguide and a second flexible plasmon waveguide located on the lower branch flexible waveguide and used for conducting an optical signal, and a flexible surface plasmon resonant ring formed by coupling and docking two ends of the upper branch flexible waveguide; and the annular surface of the resonant ring is perpendicular to a plane on which the lower branch flexible waveguide is located. The preparation method comprises the steps of preparing the tunable flexible surface plasmon coupler; separating the two left and right ends of the upper branch flexible waveguide and the lower branch flexible waveguide to the flexible surface plasmon directional coupler; and crimping and docking the two ends of the upper branch flexible waveguide so as to form the three-dimensional flexible surface plasmon resonant ring, and obtaining the adjustable resonant cavity. According to the resonant cavity, the bending loss can be reduced, and a Q value is improved.

Description

technical field [0001] The invention relates to an adjustable ring resonant cavity based on a flexible surface plasmon coupler and a preparation method thereof, belonging to the technical field of integrated optics. Background technique [0002] Integrated optical ring resonators are currently one of the most widely used structures in integrated optical functional devices and systems, and are the core sensitive units of many integrated optical functional devices such as ring lasers, filters, optical modulators, and optical switches. In particular, the ring resonator realized by the integrated optical waveguide structure is widely used in many fields such as optical sensing and optical communication due to its advantages of strong localization of the optical field, small mode volume, monolithic integration, and compatibility with traditional CMOS processes. It has a very broad application prospect. Among them, a high quality factor (Quality factor, Q value) is a key paramete...

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Problems solved by technology

[0005] Purpose of the invention: Aiming at the problems that existing ring resonators composed of surface plasmon waveguides have large bending loss, the loss of the resonator and the coupling coefficient cannot be adjusted, etc., the present invention provides a flexible surface plasmon coupler based on The tunable ring resonant cavity of the invention, and a preparation method of the resonator is provided

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