A performance adjustment method of an aoi defect detection system

Abstract

The invention discloses a performance adjustment method of an AOI defect detection system, which includes the following steps: S1: making several simulated defect samples with different parameters according to actual defects, and the parameters include any one of size and contrast or two; the defect size or contrast of the simulated defect sample changes in a gradient and must cover the allowed minimum detection specification; S2: collect the image of the simulated defect sample and perform defect detection on it, and perform image processing algorithms during the detection process Adjust the detection limit of the AOI defect detection system to meet the allowable minimum detection specification; the present invention effectively avoids the time-consuming collection of actual defect samples and the difficulty of covering actual defects by making a large number of simulated defect samples, and reduces the time At the same time, it can quickly and accurately perform defect assessment, which improves the efficiency and accuracy of performance adjustment of the AOI defect detection system.

Description

technical field [0001] The invention belongs to the technical field of optical automatic defect detection, and more specifically relates to a performance adjustment method of an AOI defect detection system. Background technique [0002] Automatic Optical Inspection (AOI) defect detection system refers to the use of optical imaging technology (usually using cameras and lenses) to obtain images of the target under test, and then through a certain image processing algorithm to obtain the target's image from the captured image. Information such as size, location and defects can be used to perform tasks such as product inspection, component identification and positioning on the assembly line, measurement in process monitoring, process control feedback, classification and grouping. At present, AOI has a wide range of applications in many industries such as semiconductors, industrial robots, auto parts manufacturing, printing, steel, medical and pharmaceuticals. [0003] The Backl...

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Problems solved by technology

[0005] Aiming at at least one defect or improvement requirement of the prior art, the present invention provides a performance adjustment method of an AOI defect detection system, the purpose of which is to solve the problem that the existing AOI defect detection system relies heavily on defect samples provided by customers , Low detection rate and detection accuracy of non-significant defects

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