A high-speed variable capacitor driven by digital circuit

Abstract

The invention discloses a high-speed variable capacitor driven by a digital circuit, which includes a plurality of capacitor units and an AD converter whose number of digits corresponds to the number of the capacitor units; a plurality of the capacitor units are arranged in parallel, and the capacitor units include capacitor elements connected in series And solid-state relays, each solid-state relay is connected to an output end of the AD converter, and the input end of the AD converter is connected to an analog input pin for inputting an analog signal, and the input analog signal is converted into a multi-digit number by the AD converter Signals, multi-digit digital signals respectively control the on-off of each solid-state relay, and control the working quantity of the capacitor unit through the on-off of the solid-state relay to achieve different capacitor outputs. The high-speed variable capacitor of the present invention solves the problem of long operating time of the traditional mechanical vacuum variable capacitor, and can be used in circuits and equipment that require high variable capacitor change speed, and at the same time, the all-solid design can improve system reliability.

Description

technical field [0001] The invention relates to the field, in particular to a high-speed variable capacitor driven by a digital circuit, which can be used in semiconductor high-power equipment, high-speed matching devices and matching networks, various tuning circuits, etc., and can replace some traditional vacuum variable capacitors. Background technique [0002] At present, the domestic semiconductor industry is developing rapidly, and the application of RF power supply is becoming more and more extensive. The matching speed of the output power of RF power supply is getting higher and higher. At present, most of the variable capacitors in the matcher are vacuum variable capacitors driven by motor machinery. Through Changing the effective area between the pole pieces changes the capacitance value, while the mechanical drive is affected by the starting speed of the motor, material properties, etc., and the change speed is slow. Compared with solid-state electronic components,...

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Problems solved by technology

[0002] At present, the domestic semiconductor industry is developing rapidly, and the application of RF power supply is becoming more and more extensive. The matching speed of the output power of RF power supply is getting higher and higher. At present, most of the variable capacitors in the matcher are vacuum variable capacitors driven by motor machinery. Through Changing the effective area between the pole pieces changes the capacitance value, while the mechanical drive is affected by the starting speed of the motor, material properties, etc., and the change speed is slow. Compared with solid-state electronic components, the shock resistance of power devices such as motors and couplings is poor. , resulting in low reliability of the variable capacitor, and the speed of capacitance value change cannot meet the demand

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